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Journal description
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Details for article 19 of 41 found articles
| Title: |
Impact of plasma reactive ion etching on low dielectric constant porous organosilicate films' microstructure and chemical composition |
| Author: |
Lépinay, Matthieu Lee, Daniel Scarazzini, Riccardo Bardet, Michel Veillerot, Marc Broussous, Lucile Licitra, Christophe Jousseaume, Vincent Bertin, François Rouessac, Vincent Ayral, André |
| Appeared in: |
Microporous and mesoporous materials |
| Paging: | Volume 228 (2016) nr. C pages 8 p. |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Elsevier Inc. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 41 found articles
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