|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 36 of 37 found articles
| Title: |
Ultra-thin oxides on silicon fabricated using ultra-slow multicharged ion beams |
| Author: |
Borsoni, G. Béchu, N. Gros-Jean, M. Korwin-Pawlowski, M.L. Laffitte, R. Le Roux, V. Vallier, L. Rochat, N. Wyon, C. |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 41 (2001) nr. 7 pages 4 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 36 of 37 found articles
| << previous | next >> |