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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
4 results found
| no | title | author | magazine | year | volume | issue | page(s) | type |
| 1 | Novel “Topography-Sensitive” Bottom-Up Growth of Ruthenium and Copper for Filling Nano-Features Using Supercritical Co2 Fluids: Beyond Scalability |
Kondoh, E. |
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992 | 1 |
article |
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| 2 | Novel vapor phase method for making ultra thin conformal films of polytetrafluoroethylene (PTFE) |
Gupta, Sushant |
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992 | 1 |
article |
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| 3 | Supercritical Fluid Deposition of Ruthenium Thin Films: A Kinetic Study |
Karanikas, Christos F. |
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992 | 1 |
article |
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| 4 | Ultra Thin Cu film Fabrication by Supercritical Fluid Deposition for ULSI Metallization |
Momose, Takeshi |
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992 | 1 |
article |
4 results found