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6 results found
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title
author
magazine
year
volume
issue
page(s)
type
1
Deep X-ray exposure system with multistage for 3D microfabrication
You, Hui
2002
2
1
p. 1-11
article
2
Fabrication of electrostatic micro-actuators for a hard disk drive application
Iizuka, Tetsuhiko
2002
2
1
p. 47-64
article
3
Micro machining of single crystal diamond by utilization of tool wear during cutting process of ferrous material
Shabouk, Sohaib
2002
2
1
p. 13-26
article
4
Micro parts reinforced by addition of unidirectional whiskers in laser photolithography
Nakamoto, Takeshi
2002
2
1
p. 27-45
article
5
Micropositioners for microscopy applications and microbiology based on piezoelectric actuators
Bergander, A.
2002
2
1
p. 65-76
article
6
Spiral-type micro-machine for medical applications
Ishiyama, K.
2002
2
1
p. 77-86
article
6 results found
Koninklijke Bibliotheek -
National Library of the Netherlands