| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planes
|
Schröpfer, G.
|
|
1999
|
5 |
4 |
p. 194-199
|
artikel
|
| 2 |
A study of the effect of the fabrication process on diffusion in a layered thin film
|
Hirasawa, T.
|
|
1999
|
5 |
4 |
p. 169-172
|
artikel
|
| 3 |
Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review
|
Rymuza, Z.
|
|
1999
|
5 |
4 |
p. 173-180
|
artikel
|
| 4 |
Control tribological and mechanical properties of MEMS surfaces. Part 2: nanomechanical behavior of self-lubricating ultrathin films
|
Rymuza, Z.
|
|
1999
|
5 |
4 |
p. 181-188
|
artikel
|
| 5 |
Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms
|
Kamiya, D.
|
|
1999
|
5 |
4 |
p. 161-165
|
artikel
|
| 6 |
Finite element investigation into proposed bearing mechanism for a fluid driven micro actuator
|
Dhariwal, R. S.
|
|
1999
|
5 |
4 |
p. 200-204
|
artikel
|
| 7 |
Inexpensive, quickly producable X-ray mask for LIGA
|
Harris, C.
|
|
1999
|
5 |
4 |
p. 189-193
|
artikel
|
| 8 |
Manufacture of diffraction grating on tiny parts by means of ultraprecision milling
|
Sawada, K.
|
|
1999
|
5 |
4 |
p. 157-160
|
artikel
|
| 9 |
Multilayer polyimide film substrates for interconnections in microsystems
|
Fach, A.
|
|
1999
|
5 |
4 |
p. 166-168
|
artikel
|
| 10 |
Role of the film texturing on the response of particle detectors based on CVD diamond
|
Faggio, G.
|
|
1999
|
5 |
4 |
p. 151-156
|
artikel
|
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