| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A microvalve matrix using piezoelectric actuators
|
Watanabe, T.
|
|
1997
|
3 |
3 |
p. 107-111
|
artikel
|
| 2 |
Characterisation of silicon carbide JFETs with respect to microsystems for high temperature applications
|
Zappe, S.
|
|
1997
|
3 |
3 |
p. 134-138
|
artikel
|
| 3 |
Fabrication of collimating grids for an x-ray solar telescope using LIGA methods
|
Brennen, R. A.
|
|
1997
|
3 |
3 |
p. 91-96
|
artikel
|
| 4 |
Fusion bonding of rough surfaces with polishing technique for silicon micromachining
|
Gui, C.
|
|
1997
|
3 |
3 |
p. 122-128
|
artikel
|
| 5 |
Injection molding and related techniques for fabrication of microstructures
|
Piotter, V.
|
|
1997
|
3 |
3 |
p. 129-133
|
artikel
|
| 6 |
InP-based micromachined Mach-Zehnder interferometer stress sensors
|
Seassal, C.
|
|
1997
|
3 |
3 |
p. 139-144
|
artikel
|
| 7 |
Microsystems for automotive application - semiconductor aspects
|
Cambou, B. F.
|
|
1997
|
3 |
3 |
p. 102-106
|
artikel
|
| 8 |
Novel fast atom beam (FAB) processes for fabricating functional nanostructures on three-dimensional microstructures
|
Hatakeyama, M.
|
|
1997
|
3 |
3 |
p. 112-116
|
artikel
|
| 9 |
Step by step development of an electrochemical microanalytical system
|
Süß, W.
|
|
1997
|
3 |
3 |
p. 97-101
|
artikel
|
| 10 |
Tensile testing of microfabricated thin films
|
Ogawa, H.
|
|
1997
|
3 |
3 |
p. 117-121
|
artikel
|
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