| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A MEMS-based thermal infrared emitter for an integrated NDIR spectrometer
|
Calaza, C.
|
|
2012
|
18 |
7-8 |
p. 1147-1154
|
artikel
|
| 2 |
Artificial intelligence based optimization for vibration energy harvesting applications
|
Hadas, Zdenek
|
|
2012
|
18 |
7-8 |
p. 1003-1014
|
artikel
|
| 3 |
Battery-and wire-less tire pressure measurement systems (TPMS) sensor
|
Makki, Noaman
|
|
2012
|
18 |
7-8 |
p. 1201-1212
|
artikel
|
| 4 |
Binary Zero-Power Sensors: an alternative solution for power-free energy-autonomous sensor systems
|
Frank, Thomas
|
|
2012
|
18 |
7-8 |
p. 1225-1231
|
artikel
|
| 5 |
Cantilever probes for high speed AFM
|
Richter, C.
|
|
2012
|
18 |
7-8 |
p. 1119-1126
|
artikel
|
| 6 |
Cleaning of structured templates from nanoparticle accumulation using silicone
|
Merzsch, S.
|
|
2011
|
18 |
7-8 |
p. 835-842
|
artikel
|
| 7 |
CMOS: compatible wafer bonding for MEMS and wafer-level 3D integration
|
Dragoi, Viorel
|
|
2012
|
18 |
7-8 |
p. 1065-1075
|
artikel
|
| 8 |
Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluids
|
Beutel, T.
|
|
2011
|
18 |
7-8 |
p. 893-903
|
artikel
|
| 9 |
Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor
|
Wasisto, H. S.
|
|
2012
|
18 |
7-8 |
p. 905-915
|
artikel
|
| 10 |
Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments
|
Kähler, J.
|
|
2011
|
18 |
7-8 |
p. 869-878
|
artikel
|
| 11 |
Flexible and large area pressure sensors for human-neuroprostheses and human-neurorobotic interface assessment
|
Herrán, J.
|
|
2012
|
18 |
7-8 |
p. 1155-1161
|
artikel
|
| 12 |
Gold-based thin multilayers for ohmic contacts in RF-MEMS switches
|
Mulloni, V.
|
|
2012
|
18 |
7-8 |
p. 965-971
|
artikel
|
| 13 |
Hardware implementation of an electrostatic MEMS-actuator linearization
|
Mair, F.
|
|
2012
|
18 |
7-8 |
p. 955-963
|
artikel
|
| 14 |
Hysteresis correction of tactile sensor response with a generalized Prandtl–Ishlinskii model
|
Sánchez-Durán, José A.
|
|
2012
|
18 |
7-8 |
p. 1127-1138
|
artikel
|
| 15 |
Integration of impedance spectroscopy sensors in a digital microfluidic platform
|
Lederer, Thomas
|
|
2012
|
18 |
7-8 |
p. 1163-1180
|
artikel
|
| 16 |
Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substrates
|
Bittner, A.
|
|
2011
|
18 |
7-8 |
p. 879-884
|
artikel
|
| 17 |
Low-cost fiber-optic waveguide sensor for the colorimetric detection of ammonia
|
Schmitt, Katrin
|
|
2011
|
18 |
7-8 |
p. 843-848
|
artikel
|
| 18 |
Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications
|
Pabst, Oliver
|
|
2012
|
18 |
7-8 |
p. 945-953
|
artikel
|
| 19 |
Measurement technique for the thermal properties of thin-film diaphragms embedded in calorimetric flow sensors
|
Beigelbeck, Roman
|
|
2012
|
18 |
7-8 |
p. 973-981
|
artikel
|
| 20 |
MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C
|
Miyakawa, Natsuki
|
|
2012
|
18 |
7-8 |
p. 1077-1087
|
artikel
|
| 21 |
Metallo-porphyrin zinc as gas sensitive material for colorimetric gas sensors on planar optical waveguides
|
Peter, Carolin
|
|
2012
|
18 |
7-8 |
p. 925-930
|
artikel
|
| 22 |
Microfabricated self-resonant structure as a passive wireless dielectric constant and conductivity sensor
|
Zhang, Sheng
|
|
2011
|
18 |
7-8 |
p. 885-891
|
artikel
|
| 23 |
Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy
|
Mescheder, Ulrich
|
|
2012
|
18 |
7-8 |
p. 931-943
|
artikel
|
| 24 |
Micromechanical force sensors based on SU-8 resist
|
Jordan, A.
|
|
2012
|
18 |
7-8 |
p. 1095-1101
|
artikel
|
| 25 |
Modeling of gold microbeams as strain and pressure sensors for characterizing MEMS packages
|
Faes, A.
|
|
2012
|
18 |
7-8 |
p. 1139-1145
|
artikel
|
| 26 |
Modeling the performance of a micromachined piezoelectric energy harvester
|
Alamin Dow, Ali B.
|
|
2012
|
18 |
7-8 |
p. 1035-1043
|
artikel
|
| 27 |
Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode
|
Ruiz, V.
|
|
2012
|
18 |
7-8 |
p. 997-1001
|
artikel
|
| 28 |
Multi-channel conical microstructures: perspectives
|
Sukhoveyev, Sergey
|
|
2012
|
18 |
7-8 |
p. 1103-1107
|
artikel
|
| 29 |
Nanowire silicon as a material for thermoelectric energy conversion
|
Stranz, A.
|
|
2011
|
18 |
7-8 |
p. 857-862
|
artikel
|
| 30 |
New method for selectivity enhancement of SiC field effect gas sensors for quantification of NOx
|
Bur, Christian
|
|
2012
|
18 |
7-8 |
p. 1015-1025
|
artikel
|
| 31 |
Novel 3D manufacturing method combining microelectrial discharge machining and electrochemical polishing
|
Richter, Claudia
|
|
2012
|
18 |
7-8 |
p. 1109-1118
|
artikel
|
| 32 |
Platinated ultrathin films made of carbon nanotubes
|
Bohnenberger, Timo
|
|
2011
|
18 |
7-8 |
p. 863-868
|
artikel
|
| 33 |
Power supply sources based on resonant energy harvesting
|
Fiala, P.
|
|
2012
|
18 |
7-8 |
p. 1181-1192
|
artikel
|
| 34 |
Resonantly excited AlN-based microcantilevers for immunosensing
|
Oliver, M. J.
|
|
2012
|
18 |
7-8 |
p. 1089-1094
|
artikel
|
| 35 |
Role of the electro-thermo-mechanical multiple coupling on the operation of RF-microswitch
|
Brusa, Eugenio
|
|
2012
|
18 |
7-8 |
p. 983-995
|
artikel
|
| 36 |
Selective modal excitation in coupled piezoelectric microcantilevers
|
Gil, M.
|
|
2012
|
18 |
7-8 |
p. 917-924
|
artikel
|
| 37 |
Sensing viscosity and density of glycerol–water mixtures utilizing a suspended plate MEMS resonator
|
Cerimovic, Samir
|
|
2012
|
18 |
7-8 |
p. 1045-1056
|
artikel
|
| 38 |
Smart ultrasonic sensors systems: potential of aluminum nitride thin films for the excitation of the ultrasound at high frequencies
|
Walter, Susan
|
|
2012
|
18 |
7-8 |
p. 1193-1199
|
artikel
|
| 39 |
Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Prague, Czech Republic, 18–20 April 2011
|
Schmid, Ulrich
|
|
2012
|
18 |
7-8 |
p. 833
|
artikel
|
| 40 |
Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application
|
Fraga, M. A.
|
|
2012
|
18 |
7-8 |
p. 1027-1033
|
artikel
|
| 41 |
Thermopile-based THz antenna
|
Szentpáli, Béla
|
|
2011
|
18 |
7-8 |
p. 849-856
|
artikel
|
| 42 |
Thin-film electro-acoustic sensors based on AlN and its alloys: possibilities and limitations
|
Wingqvist, Gunilla
|
|
2012
|
18 |
7-8 |
p. 1213-1223
|
artikel
|
| 43 |
Through wafer via holes manufacturing by variable isotropy Deep RIE process for RF applications
|
Vasilache, D.
|
|
2012
|
18 |
7-8 |
p. 1057-1063
|
artikel
|
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