| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation
|
Tang, Zhangyang
|
|
2011
|
17 |
9 |
p. 1481-1490
|
artikel
|
| 2 |
A parameter identification method for thermal flying-height control sliders
|
Sheng, Gang
|
|
2011
|
17 |
9 |
p. 1409-1415
|
artikel
|
| 3 |
A synchronous microsystem process using a dual-cylinder tool for the surface microstructures from solar cell silicon wafers
|
Pa, P. S.
|
|
2011
|
17 |
9 |
p. 1463-1470
|
artikel
|
| 4 |
Design and fabrication of implantable pressure sensing resistor sensor for human bladder monitoring system
|
Kim, Jonghyun
|
|
2011
|
17 |
9 |
p. 1453-1458
|
artikel
|
| 5 |
Design and realization of micro structured surfaces for thermodynamic applications
|
Schubert, Andreas
|
|
2011
|
17 |
9 |
p. 1471-1479
|
artikel
|
| 6 |
Design of shrinkage microvalve in microchannel with hydrophilic and hydrophobic walls
|
Zhang, Ping
|
|
2011
|
17 |
9 |
p. 1491-1495
|
artikel
|
| 7 |
Development of an injection molding tool for complex microfluidic geometries
|
Geiger, Emil J.
|
|
2011
|
17 |
9 |
p. 1537-1540
|
artikel
|
| 8 |
Device for oxide dots fabrication with copper wire as cathode probe
|
Sathiyaraj, K.
|
|
2011
|
17 |
9 |
p. 1459-1462
|
artikel
|
| 9 |
Dielectric property improvement of polymer-nanosized strontium titanate-composites for applications in microelectronics
|
Hanemann, Thomas
|
|
2011
|
17 |
9 |
p. 1529-1535
|
artikel
|
| 10 |
Fabrication and electrical characterization of integrated nano-scale fluidic channels
|
Afanasiev, A.
|
|
2011
|
17 |
9 |
p. 1511-1518
|
artikel
|
| 11 |
Improvement of damping performance by splitting damping material
|
Eguchi, Hajime
|
|
2011
|
17 |
9 |
p. 1497-1503
|
artikel
|
| 12 |
Influence and limits of sintering temperatures on the movability of shaft-to-collar connections formed by two-component micro powder injection moulding
|
Ruh, Andreas
|
|
2011
|
17 |
9 |
p. 1541-1546
|
artikel
|
| 13 |
Numerical study of enhancing the mixing effect in microchannels via transverse electroosmotic flow by placing electrodes on top and bottom of the channel
|
Song, Hongjun
|
|
2011
|
17 |
9 |
p. 1427-1437
|
artikel
|
| 14 |
On the tunability of a MEMS based variable capacitor with a novel structure
|
Mobki, Hamed
|
|
2011
|
17 |
9 |
p. 1447-1452
|
artikel
|
| 15 |
Photoresist-based integration of enzyme functionality into MEMS
|
Thomas, Nicole
|
|
2011
|
17 |
9 |
p. 1505-1510
|
artikel
|
| 16 |
Polymeric (SU-8) optical microscanner driven by electrostatic actuation
|
Moon, Seung-Hwan
|
|
2011
|
17 |
9 |
p. 1439-1445
|
artikel
|
| 17 |
Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
|
Kan, J. A. van
|
|
2011
|
17 |
9 |
p. 1519-1527
|
artikel
|
| 18 |
Review of MEMS flow sensors based on artificial hair cell sensor
|
Mat Nawi, Mohd Norzaidi
|
|
2011
|
17 |
9 |
p. 1417-1426
|
artikel
|
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