| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Active positioning device for a perimodiolar cochlear electrode array
|
Arcand, B. Y.
|
|
2004
|
|
6-7 |
p. 478-483
|
artikel
|
| 2 |
A fast settling servo controller for high-density disk drives
|
Kang, C.-I.
|
|
2003
|
|
6-7 |
p. 484-495
|
artikel
|
| 3 |
A Micro corona motor fabricated by a SU-8 built-on X-ray mask
|
Lee, S.
|
|
2004
|
|
6-7 |
p. 522-526
|
artikel
|
| 4 |
Analysis and design of hydrodynamic journal air bearings for high performance HDD spindle
|
Hwang, T.
|
|
2003
|
|
6-7 |
p. 386-394
|
artikel
|
| 5 |
A surface micromachining process for suspended RF-MEMS applications using porous silicon
|
Ding, Y.
|
|
2003
|
|
6-7 |
p. 470-473
|
artikel
|
| 6 |
Combination of thick resist and electroforming technologies for monolithic inkjet application
|
Chung, C. K.
|
|
2004
|
|
6-7 |
p. 462-466
|
artikel
|
| 7 |
Continuation and change
|
Michel, Bernd
|
|
2003
|
|
6-7 |
p. 379-380
|
artikel
|
| 8 |
Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography
|
Achenbach, S.
|
|
2004
|
|
6-7 |
p. 493-497
|
artikel
|
| 9 |
Design and development of a piezoresistive pressure sensor on micromachined silicon for high-temperature applications and of a signal-conditioning electronic circuit
|
Crescini, D.
|
|
2003
|
|
6-7 |
p. 431-435
|
artikel
|
| 10 |
Design of flexural pivot for use in hard disc drive actuator
|
He, Z.
|
|
2003
|
|
6-7 |
p. 453-460
|
artikel
|
| 11 |
Determination of mechanical properties of slip cast, micro powder injection moulded and microcast high aspect ratio microspecimens
|
Auhorn, M.
|
|
2004
|
|
6-7 |
p. 489-492
|
artikel
|
| 12 |
Development of a freestanding copper antiscatter grid using deep X-ray lithography
|
Makarova, O. V.
|
|
2003
|
|
6-7 |
p. 395-398
|
artikel
|
| 13 |
Dynamic finite element analysis of a micro lobe pump
|
Huber, N.
|
|
2003
|
|
6-7 |
p. 465-469
|
artikel
|
| 14 |
Effect of workpiece springback on micromilling forces
|
Friedrich, C. R.
|
|
2004
|
|
6-7 |
p. 472-477
|
artikel
|
| 15 |
Effects of microstructure on the mechanical properties of copper films for high aspect ratio structures
|
Cordill, M. J.
|
|
2004
|
|
6-7 |
p. 451-455
|
artikel
|
| 16 |
Electrodeposited nickel–manganese: an alloy for microsystem applications
|
Goods, S. H.
|
|
2004
|
|
6-7 |
p. 498-505
|
artikel
|
| 17 |
Electromechanical model of RF MEMS switches
|
Zhang, L. X.
|
|
2003
|
|
6-7 |
p. 420-426
|
artikel
|
| 18 |
Evaluation of optical qualities of a LIGA-spectrometer in SU-8
|
Mappes, T.
|
|
2004
|
|
6-7 |
p. 560-563
|
artikel
|
| 19 |
Fabrication of focused two-dimensional grids
|
Makarova, O. V.
|
|
2004
|
|
6-7 |
p. 540-543
|
artikel
|
| 20 |
Fabrication of grids and collimators using SU-8 as a mold
|
Makarova, O. V.
|
|
2004
|
|
6-7 |
p. 536-539
|
artikel
|
| 21 |
Fabrication of microchannels in negative resist
|
Liu, G.
|
|
2003
|
|
6-7 |
p. 461-464
|
artikel
|
| 22 |
Fast prototyping of high-aspect ratio, high-resolution X-ray masks by gas-assisted focused ion beam
|
Malek, C. Khan
|
|
2003
|
|
6-7 |
p. 409-412
|
artikel
|
| 23 |
High-aspect-ratio microstructure filling by centrifugal force field modeling
|
Tsai, T.-H.
|
|
2004
|
|
6-7 |
p. 571-577
|
artikel
|
| 24 |
High aspect ratio spiral and vertical meander micro coils for actuator applications
|
Seidemann, V.
|
|
2004
|
|
6-7 |
p. 564-570
|
artikel
|
| 25 |
High density and through wafer copper interconnections and solder bumps for MEMS wafer-level packaging
|
Lin, C.-J.
|
|
2004
|
|
6-7 |
p. 517-521
|
artikel
|
| 26 |
High speed sub-micron bit detection using tapered aperture mounted optical slider flying above a patterned metal medium
|
Ohkubo, T.
|
|
2003
|
|
6-7 |
p. 413-419
|
artikel
|
| 27 |
Injection molding of 316L stainless steel microstructures
|
Liu, Z. Y.
|
|
2003
|
|
6-7 |
p. 507-510
|
artikel
|
| 28 |
Local heat transfer characteristics in a single rotating disk and co-rotating disks
|
Cho, H. H.
|
|
2003
|
|
6-7 |
p. 399-408
|
artikel
|
| 29 |
Metrology of high aspect ratio MEMS
|
Nichols, J. F.
|
|
2004
|
|
6-7 |
p. 556-559
|
artikel
|
| 30 |
Micro assembly injection moulding for the generation of hybrid microstructures
|
Michaeli, W.
|
|
2003
|
|
6-7 |
p. 427-430
|
artikel
|
| 31 |
Microfabrication and test of a magnetic field sensor using electrodeposited thin film of giant magnetoresistive (Cu/Co)x multilayers
|
Zhang, H.
|
|
2003
|
|
6-7 |
p. 436-440
|
artikel
|
| 32 |
Micro gas bearings fabricated by deep X-ray lithography
|
Kim, D.
|
|
2004
|
|
6-7 |
p. 456-461
|
artikel
|
| 33 |
Micro-hinges changed flexural rigidity intermittently for micromechanism joints
|
Horie, M.
|
|
2003
|
|
6-7 |
p. 381-385
|
artikel
|
| 34 |
Micromachining of highly reproducible step substrates for high Tc step junction dc-SQUIDs
|
Wang, J.
|
|
2003
|
|
6-7 |
p. 480-483
|
artikel
|
| 35 |
Modal analysis of a unimorph piezoelectrical transducer
|
Liu, C.
|
|
2003
|
|
6-7 |
p. 474-479
|
artikel
|
| 36 |
Modeling of angular-rate bandwidth for a vibrating microgyroscope
|
Hong, Y.
|
|
2003
|
|
6-7 |
p. 441-448
|
artikel
|
| 37 |
Preface: Harmst2003
|
Hruby, Jill
|
|
2004
|
|
6-7 |
p. 439
|
artikel
|
| 38 |
Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process
|
Pérennès, F.
|
|
2004
|
|
6-7 |
p. 552-555
|
artikel
|
| 39 |
Replication of LIGA structures using microcasting
|
Baumeister, G.
|
|
2004
|
|
6-7 |
p. 484-488
|
artikel
|
| 40 |
Replication of micro components by different variants of injection molding
|
Piotter, V.
|
|
2004
|
|
6-7 |
p. 547-551
|
artikel
|
| 41 |
Replication of microlens arrays by injection molding
|
Lee, B.-K.
|
|
2004
|
|
6-7 |
p. 531-535
|
artikel
|
| 42 |
Selection of mold materials for electroforming of monolithic two-layer microstructure
|
Chung, C. K.
|
|
2004
|
|
6-7 |
p. 467-471
|
artikel
|
| 43 |
Shape deviations in masks for optical structures produced by electron beam lithography
|
Last, A.
|
|
2004
|
|
6-7 |
p. 527-530
|
artikel
|
| 44 |
SOI wafer mold with high-aspect-ratio microstructures for hot embossing process
|
Zhao, Y.
|
|
2004
|
|
6-7 |
p. 544-546
|
artikel
|
| 45 |
The mechanical properties, dimensional tolerance and microstructural characterization of micro-molded ceramic and metal components
|
Garino, T. J.
|
|
2004
|
|
6-7 |
p. 506-509
|
artikel
|
| 46 |
The role of microstructure in the electrical and thermal conductivity of Ni-alloys for LIGA microsystems
|
Graham, S.
|
|
2004
|
|
6-7 |
p. 510-516
|
artikel
|
| 47 |
Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography
|
Sato, H.
|
|
2004
|
|
6-7 |
p. 440-443
|
artikel
|
| 48 |
Two-dimensional modeling of nickel electrodeposition in LIGA microfabrication
|
Chen, K. S.
|
|
2004
|
|
6-7 |
p. 444-450
|
artikel
|
| 49 |
Ultra thin chips for miniaturized products
|
Jung, E.
|
|
2003
|
|
6-7 |
p. 449-452
|
artikel
|
| 50 |
Ultraviolet embossing for patterning high aspect ratio polymeric microstructures
|
Chan-Park, M. B.
|
|
2003
|
|
6-7 |
p. 501-506
|
artikel
|
| 51 |
Vibro-acoustic interaction of components in hard disk drive under seek process
|
Gao, F.
|
|
2003
|
|
6-7 |
p. 496-500
|
artikel
|
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