| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Decomposition of Benzene in Air in a Plasma Reactor: Effect of Reactor Type and Operating Conditions
|
A. Ogata
|
|
2002
|
22 |
4 |
p. 537-552
16 p.
|
artikel
|
| 2 |
Decomposition of Benzene in Air in a Plasma Reactor: Effect of Reactor Type and Operating Conditions
|
Ogata, A.
|
|
2002
|
22 |
4 |
p. 537-552
|
artikel
|
| 3 |
Density and Rotational Temperature Measurements of the OH° and NO° Radicals Produced by a Gliding Arc in Humid Air
|
B. Benstaali
|
|
2002
|
22 |
4 |
p. 553-571
19 p.
|
artikel
|
| 4 |
Density and Rotational Temperature Measurements of the OH° and NO° Radicals Produced by a Gliding Arc in Humid Air
|
Benstaali, B.
|
|
2002
|
22 |
4 |
p. 553-571
|
artikel
|
| 5 |
Deposition of Diamond-Like Carbon Film in a Closed-Space CH4 RF Plasma
|
N. Mutsukura
|
|
2002
|
22 |
4 |
p. 607-617
11 p.
|
artikel
|
| 6 |
Deposition of Diamond-Like Carbon Film in a Closed-Space CH4 RF Plasma
|
Mutsukura, N.
|
|
2002
|
22 |
4 |
p. 607-617
|
artikel
|
| 7 |
Effect of Wafer Temperature on High Aspect Ratio Hardmask Etching
|
S. Lee
|
|
2002
|
22 |
4 |
p. 627-637
11 p.
|
artikel
|
| 8 |
Effect of Wafer Temperature on High Aspect Ratio Hardmask Etching
|
Lee, S.
|
|
2002
|
22 |
4 |
p. 627-637
|
artikel
|
| 9 |
Formation of Negative Hydrogen Ions in a NeH2 Hollow Cathode Discharge
|
G. M. Petrov
|
|
2002
|
22 |
4 |
p. 573-605
33 p.
|
artikel
|
| 10 |
Formation of Negative Hydrogen Ions in a Ne–H2 Hollow Cathode Discharge
|
Petrov, G. M.
|
|
2002
|
22 |
4 |
p. 573-605
|
artikel
|
| 11 |
Influence of Gadolinium on Carbon Arc Plasma and Formation of Fullerenes and Nanotubes
|
H. Lange
|
|
2002
|
22 |
4 |
p. 523-536
14 p.
|
artikel
|
| 12 |
Influence of Gadolinium on Carbon Arc Plasma and Formation of Fullerenes and Nanotubes
|
Lange, H.
|
|
2002
|
22 |
4 |
p. 523-536
|
artikel
|
| 13 |
Optical Diagnostics of the Effect of Oxygen on Bi-Level Contact Etch
|
S. Lee
|
|
2002
|
22 |
4 |
p. 619-626
8 p.
|
artikel
|
| 14 |
Optical Diagnostics of the Effect of Oxygen on Bi-Level Contact Etch
|
Lee, S.
|
|
2002
|
22 |
4 |
p. 619-626
|
artikel
|
| 15 |
Ozone Production in the Positive DC Corona Discharge: Model and Comparison to Experiments
|
Junhong Chen
|
|
2002
|
22 |
4 |
p. 495-522
28 p.
|
artikel
|
| 16 |
Ozone Production in the Positive DC Corona Discharge: Model and Comparison to Experiments
|
Chen, Junhong
|
|
2002
|
22 |
4 |
p. 495-522
|
artikel
|
| 17 |
PAHs Formation in the Depositions in a Methyl tert-Butyl Ether/Ar, a Methyl tert-Butyl Ether/O2/Ar and a Methyl tert-Butyl Ether/H2/Ar RF Plasma Environment
|
L.-T. Hsieh
|
|
2002
|
22 |
4 |
p. 639-658
20 p.
|
artikel
|
| 18 |
PAHs Formation in the Depositions in a Methyl tert-Butyl Ether/Ar, a Methyl tert-Butyl Ether/O2/Ar and a Methyl tert-Butyl Ether/H2/Ar RF Plasma Environment
|
Hsieh, L.-T.
|
|
2002
|
22 |
4 |
p. 639-658
|
artikel
|
| 19 |
Two-Temperature Transport Coefficients in ArgonHydrogen PlasmasI: Elastic Processes and Collision Integrals
|
V. Rat
|
|
2002
|
22 |
4 |
p. 453-474
22 p.
|
artikel
|
| 20 |
Two-Temperature Transport Coefficients in Argon–Hydrogen Plasmas—I: Elastic Processes and Collision Integrals
|
Rat, V.
|
|
2002
|
22 |
4 |
p. 453-474
|
artikel
|
| 21 |
Two-Temperature Transport Coefficients in ArgonHydrogen PlasmasII: Inelastic Processes and Influence of Composition
|
V. Rat
|
|
2002
|
22 |
4 |
p. 475-493
19 p.
|
artikel
|
| 22 |
Two-Temperature Transport Coefficients in Argon–Hydrogen Plasmas—II: Inelastic Processes and Influence of Composition
|
Rat, V.
|
|
2002
|
22 |
4 |
p. 475-493
|
artikel
|
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