| no |
title |
author |
magazine |
year |
volume |
issue |
page(s) |
type |
| 1 |
A Method of Mechanistic Model Validation with a Case Study in Plasma Etching
|
R. Paul Bray
|
|
2001
|
21 |
1 |
p. 163-174
12 p.
|
article
|
| 2 |
A Method of Mechanistic Model Validation with a Case Study in Plasma Etching
|
Bray, R. Paul
|
|
2001
|
21 |
1 |
p. 163-174
|
article
|
| 3 |
A New Modified Pseudoequilibrium Calculation to Determine the Composition of Hydrogen and Nitrogen Plasmas at Atmospheric Pressure
|
P. André
|
|
2001
|
21 |
1 |
p. 83-105
23 p.
|
article
|
| 4 |
A New Modified Pseudoequilibrium Calculation to Determine the Composition of Hydrogen and Nitrogen Plasmas at Atmospheric Pressure
|
André, P.
|
|
2001
|
21 |
1 |
p. 83-105
|
article
|
| 5 |
A Simplified Model for the Etch Rate of Novolac-Based Photoresist
|
R. Paul Bray
|
|
2001
|
21 |
1 |
p. 149-161
13 p.
|
article
|
| 6 |
A Simplified Model for the Etch Rate of Novolac-Based Photoresist
|
Bray, R. Paul
|
|
2001
|
21 |
1 |
p. 149-161
|
article
|
| 7 |
Characterization of the Converging Jet Region in a Triple Torch Plasma Reactor
|
M. Asmann
|
|
2001
|
21 |
1 |
p. 37-63
27 p.
|
article
|
| 8 |
Characterization of the Converging Jet Region in a Triple Torch Plasma Reactor
|
Asmann, M.
|
|
2001
|
21 |
1 |
p. 37-63
|
article
|
| 9 |
Diagnostics of an RF Plasma Flash Evaporation Process Using the Monochromatic Imaging Technique
|
P. Buchner
|
|
2001
|
21 |
1 |
p. 1-21
21 p.
|
article
|
| 10 |
Diagnostics of an RF Plasma Flash Evaporation Process Using the Monochromatic Imaging Technique
|
Buchner, P.
|
|
2001
|
21 |
1 |
p. 1-21
|
article
|
| 11 |
Experimental Testing of a Curvilinear Gas Shroud Nozzle for Improved Plasma Spraying
|
I. Thomson
|
|
2001
|
21 |
1 |
p. 65-82
18 p.
|
article
|
| 12 |
Experimental Testing of a Curvilinear Gas Shroud Nozzle for Improved Plasma Spraying
|
Thomson, I.
|
|
2001
|
21 |
1 |
p. 65-82
|
article
|
| 13 |
From Chemical Kinetics to Streamer Corona Reactor and Voltage Pulse Generator
|
K. Yan
|
|
2001
|
21 |
1 |
p. 107-137
31 p.
|
article
|
| 14 |
From Chemical Kinetics to Streamer Corona Reactor and Voltage Pulse Generator
|
Yan, K.
|
|
2001
|
21 |
1 |
p. 107-137
|
article
|
| 15 |
Generation of Long, Laminar Plasma Jets at Atmospheric Pressure and Effects of Flow Turbulence
|
Wenxia Pan
|
|
2001
|
21 |
1 |
p. 23-35
13 p.
|
article
|
| 16 |
Generation of Long, Laminar Plasma Jets at Atmospheric Pressure and Effects of Flow Turbulence
|
Pan, Wenxia
|
|
2001
|
21 |
1 |
p. 23-35
|
article
|
| 17 |
Rate Coefficient for Self-Association Reaction of CF2 Radicals Determined in the Afterglowof Low-Pressure C4F8 Plasmas
|
C. Suzuki
|
|
2001
|
21 |
1 |
p. 139-147
9 p.
|
article
|
| 18 |
Rate Coefficient for Self-Association Reaction of CF2 Radicals Determined in the Afterglowof Low-Pressure C4F8 Plasmas
|
Suzuki, C.
|
|
2001
|
21 |
1 |
p. 139-147
|
article
|
Journal description