| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A new process for the fabrication of miniature Fabry Perot spectrometers
|
Zavracky, Paul M.
|
|
1998
|
8 |
5 |
p. 485-504
20 p.
|
artikel
|
| 2 |
A positive displacement micropump for microdialysis
|
Cunneen, James
|
|
1998
|
8 |
5 |
p. 561-583
23 p.
|
artikel
|
| 3 |
A pressure transducer with a single-sided multilevel structure by maskless etching technology
|
Yang, Heng
|
|
1998
|
8 |
5 |
p. 585-593
9 p.
|
artikel
|
| 4 |
Balance-approach for load–displacement measurement of microstructures
|
Xiong, Xingguo
|
|
1998
|
8 |
5 |
p. 549-559
11 p.
|
artikel
|
| 5 |
Design, optimization and fabrication of surface micromachined pressure sensors
|
Lin, Liwei
|
|
1998
|
8 |
5 |
p. 505-519
15 p.
|
artikel
|
| 6 |
Development of comfort sensing system for human environment
|
Kang, Jeongho
|
|
1998
|
8 |
5 |
p. 459-466
8 p.
|
artikel
|
| 7 |
Development of surface micromachined magnetic actuators using electroplated permalloy
|
Liu, Chang
|
|
1998
|
8 |
5 |
p. 613-633
21 p.
|
artikel
|
| 8 |
Electrochemical etch stop engineering for bulk micromachining
|
Ashruf, C.M.A.
|
|
1998
|
8 |
5 |
p. 595-612
18 p.
|
artikel
|
| 9 |
Integration of sensors and GaAs electronic circuits on a single chip
|
Choi, Jun Rim
|
|
1998
|
8 |
5 |
p. 441-458
18 p.
|
artikel
|
| 10 |
Mems microrelays
|
Wood, Robert
|
|
1998
|
8 |
5 |
p. 535-547
13 p.
|
artikel
|
| 11 |
Mesoscopic systems: bridging from micromachined devices to macroscopic systems
|
Dewa, Andrew S
|
|
1998
|
8 |
5 |
p. 521-534
14 p.
|
artikel
|
| 12 |
Residual stresses in micro-structures fabricated by the IC-compatible sacrificial layer technique
|
Qin, S.
|
|
1998
|
8 |
5 |
p. 427-440
14 p.
|
artikel
|
| 13 |
Si-to-Si fusion bonded touch mode capacitive pressure sensors
|
Wang, Qiang
|
|
1998
|
8 |
5 |
p. 467-484
18 p.
|
artikel
|
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