| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A method to evade silicon backside damage in deep reactive ion etching for anodically bonded glass–silicon structures
|
Matsuura, T
|
|
2001
|
89 |
1-2 |
p. 71-75
5 p.
|
artikel
|
| 2 |
A micromachined connector for the coupling of optical waveguides and ribbon optical fibers
|
de Labachelerie, M.
|
|
2001
|
89 |
1-2 |
p. 36-42
7 p.
|
artikel
|
| 3 |
A micropipettor with integrated sensors
|
Szita, Nicolas
|
|
2001
|
89 |
1-2 |
p. 112-118
7 p.
|
artikel
|
| 4 |
A micropolysilicon high-angular-rate sensor with off-chip wireless transmission
|
Li, Wen J
|
|
2001
|
89 |
1-2 |
p. 56-63
8 p.
|
artikel
|
| 5 |
An audio frequency filter application of micromachined thermally-isolated diaphragm structures
|
Lee, Kwang-Hyun
|
|
2001
|
89 |
1-2 |
p. 49-55
7 p.
|
artikel
|
| 6 |
A new uncooled thermal infrared detector using silicon diode
|
Kim, Jae-Kwan
|
|
2001
|
89 |
1-2 |
p. 22-27
6 p.
|
artikel
|
| 7 |
An improved TMAH Si-etching solution without attacking exposed aluminum
|
Yan, Guizhen
|
|
2001
|
89 |
1-2 |
p. 135-141
7 p.
|
artikel
|
| 8 |
A resonantly excited 2D-micro-scanning-mirror with large deflection
|
Schenk, Harald
|
|
2001
|
89 |
1-2 |
p. 104-111
8 p.
|
artikel
|
| 9 |
CONFERENCE CALENDAR
|
|
|
2001
|
89 |
1-2 |
p. 174-
1 p.
|
artikel
|
| 10 |
Deformable magnetic mirror for adaptive optics: technological aspects
|
Cugat, O.
|
|
2001
|
89 |
1-2 |
p. 1-9
9 p.
|
artikel
|
| 11 |
Direct writing for three-dimensional microfabrication using synchrotron radiation etching
|
Katoh, Takanori
|
|
2001
|
89 |
1-2 |
p. 10-15
6 p.
|
artikel
|
| 12 |
Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique
|
Liew, Li-Anne
|
|
2001
|
89 |
1-2 |
p. 64-70
7 p.
|
artikel
|
| 13 |
Glass-to-glass electrostatic bonding with intermediate amorphous silicon film for vacuum packaging of microelectronics and its application
|
Lee, Duck-Jung
|
|
2001
|
89 |
1-2 |
p. 43-48
6 p.
|
artikel
|
| 14 |
In situ characterization of CMOS post-process micromachining
|
Warneke, Brett
|
|
2001
|
89 |
1-2 |
p. 142-151
10 p.
|
artikel
|
| 15 |
MEMS flow sensors for nano-fluidic applications
|
Wu, Shuyun
|
|
2001
|
89 |
1-2 |
p. 152-158
7 p.
|
artikel
|
| 16 |
Micro fabricated tunable bending stiffness devices
|
Tabata, Osamu
|
|
2001
|
89 |
1-2 |
p. 119-123
5 p.
|
artikel
|
| 17 |
Micromachined, flip–chip assembled, actuatable contacts for use in high density interconnection in electronics packaging
|
Miller, David C.
|
|
2001
|
89 |
1-2 |
p. 76-87
12 p.
|
artikel
|
| 18 |
Monolithically integrated micromachined RF MEMS capacitive switches
|
Park, Jae Y.
|
|
2001
|
89 |
1-2 |
p. 88-94
7 p.
|
artikel
|
| 19 |
Performance of hydrothermal PZT film on high intensity operation
|
Kanda, Takefumi
|
|
2001
|
89 |
1-2 |
p. 16-21
6 p.
|
artikel
|
| 20 |
Phase-only micromirror array fabricated by standard CMOS process
|
Tuantranont, Adisorn
|
|
2001
|
89 |
1-2 |
p. 124-134
11 p.
|
artikel
|
| 21 |
PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage
|
Yee, Youngjoo
|
|
2001
|
89 |
1-2 |
p. 166-173
8 p.
|
artikel
|
| 22 |
Study of a vaporizing water micro-thruster
|
Ye, X.Y
|
|
2001
|
89 |
1-2 |
p. 159-165
7 p.
|
artikel
|
| 23 |
Thin flexible end-effector using pneumatic balloon actuator
|
Konishi, Satoshi
|
|
2001
|
89 |
1-2 |
p. 28-35
8 p.
|
artikel
|
| 24 |
Titanium-alloy MEMS wing technology for a micro aerial vehicle application
|
Pornsin-sirirak, T.Nick
|
|
2001
|
89 |
1-2 |
p. 95-103
9 p.
|
artikel
|
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