| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Adhesion of microstructures investigated by atomic force microscopy
|
Torii, Akihiro
|
|
1994
|
40 |
1 |
p. 71-76
6 p.
|
artikel
|
| 2 |
A fully suspended, movable, single-crystal silicon, deep submicron MOSFET for nanoelectromechanical applications
|
Yao, J.Jason
|
|
1994
|
40 |
1 |
p. 77-84
8 p.
|
artikel
|
| 3 |
Conference Calendar
|
|
|
1994
|
40 |
1 |
p. 85-
1 p.
|
artikel
|
| 4 |
Electromagnetic microrelays: Concepts and fundamental characteristics
|
Hosaka, Hiroshi
|
|
1994
|
40 |
1 |
p. 41-47
7 p.
|
artikel
|
| 5 |
LIGA micropump for gases and liquids
|
Rapp, R.
|
|
1994
|
40 |
1 |
p. 57-61
5 p.
|
artikel
|
| 6 |
Loaded vibrating quartz sensors
|
Mecea, V.M.
|
|
1994
|
40 |
1 |
p. 1-27
27 p.
|
artikel
|
| 7 |
Photoassisted electrochemical micromachining of silicon in HF electrolytes
|
Mlcak, R.
|
|
1994
|
40 |
1 |
p. 49-55
7 p.
|
artikel
|
| 8 |
SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures
|
Shaw, Kevin A.
|
|
1994
|
40 |
1 |
p. 63-70
8 p.
|
artikel
|
| 9 |
Slide film damping in laterally driven microstructures
|
Cho, Young-Ho
|
|
1994
|
40 |
1 |
p. 31-39
9 p.
|
artikel
|
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