nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
Advanced eclipse pulsed laser deposition method for growth of perovskite crystals and relatives
|
Morita, Eiichi |
|
1997 |
121 |
1-4 |
p. 412-414 3 p. |
artikel |
2 |
AFM observations of DLC films prepared by the ECR sputtering method
|
Kamijo, E. |
|
1997 |
121 |
1-4 |
p. 110-115 6 p. |
artikel |
3 |
An evaluation method for a high concentration profile produced in very low energy doping processes
|
Takase, M. |
|
1997 |
121 |
1-4 |
p. 288-290 3 p. |
artikel |
4 |
Application of nitrogen implantation to ULSI
|
Murakami, Takashi |
|
1997 |
121 |
1-4 |
p. 257-261 5 p. |
artikel |
5 |
Atomistic modeling of crystal-defect mobility and interactions
|
Bulatov, V. |
|
1997 |
121 |
1-4 |
p. 251-256 6 p. |
artikel |
6 |
Author index
|
|
|
1997 |
121 |
1-4 |
p. 525-534 10 p. |
artikel |
7 |
Behavior of radiation-induced defects and amorphization in silicon crystal
|
Baba, A. |
|
1997 |
121 |
1-4 |
p. 299-301 3 p. |
artikel |
8 |
Bis(ethynylstyryl)benzene films grown by molecular beam deposition in a photon field
|
Fuchigami, H. |
|
1997 |
121 |
1-4 |
p. 422-426 5 p. |
artikel |
9 |
Carbon nitride thin films formed by low energy ion beam deposition with positive and negative ions
|
Enders, B. |
|
1997 |
121 |
1-4 |
p. 73-78 6 p. |
artikel |
10 |
Characterization and removal of residual defects in high dose, very low energy BF2 +-implanted (001) Si
|
Yang, J.J. |
|
1997 |
121 |
1-4 |
p. 291-294 4 p. |
artikel |
11 |
Characterization of carbon films produced by laser ablation of graphite in helium and nitrogen gas atmosphere
|
Saito, K. |
|
1997 |
121 |
1-4 |
p. 400-403 4 p. |
artikel |
12 |
Characterization of ion implanted TiN films
|
Oda, K. |
|
1997 |
121 |
1-4 |
p. 283-287 5 p. |
artikel |
13 |
Cohesive energy effects on the atomic transport induced by ion beam mixing
|
Chang, G.S. |
|
1997 |
121 |
1-4 |
p. 244-250 7 p. |
artikel |
14 |
Computer simulation of crystal surface modification by accelerated cluster ion impacts
|
Insepov, Z. |
|
1997 |
121 |
1-4 |
p. 44-48 5 p. |
artikel |
15 |
Controlling the molecular orientation of liquid crystalline polymer films deposited by polarized-laser chemical vapor deposition
|
Itadani, Toshiaki |
|
1997 |
121 |
1-4 |
p. 415-418 4 p. |
artikel |
16 |
Crystallization of SiSn and SiSnC layers in Si by solid phase epitaxy and ion-beam-induced epitaxy
|
Kobayashi, N. |
|
1997 |
121 |
1-4 |
p. 199-202 4 p. |
artikel |
17 |
Deposition of NiTiN nano-composite films by cathodic arc ion-plating
|
Irie, M. |
|
1997 |
121 |
1-4 |
p. 133-136 4 p. |
artikel |
18 |
Editorial Board
|
|
|
1997 |
121 |
1-4 |
p. ii-iii nvt p. |
artikel |
19 |
Effect of oxygen adsorption on ion beam induced recrystallization of copper films
|
Hishita, S. |
|
1997 |
121 |
1-4 |
p. 157-161 5 p. |
artikel |
20 |
Effects of accelerated ion beam deposition to form thin metal films on silicon
|
Iida, S. |
|
1997 |
121 |
1-4 |
p. 162-165 4 p. |
artikel |
21 |
Effects of ion-implantation with nitrogen ion on microstructures in deformed iron
|
Yamamoto, A. |
|
1997 |
121 |
1-4 |
p. 275-278 4 p. |
artikel |
22 |
ERDA analysis of the depth distribution of deuterium in ion-irradiated nickel
|
Mitamura, Tohru |
|
1997 |
121 |
1-4 |
p. 271-274 4 p. |
artikel |
23 |
Evaluation of the gate oxide transformed by ion implantation
|
Mameno, Kazunobu |
|
1997 |
121 |
1-4 |
p. 311-314 4 p. |
artikel |
24 |
Exposure of spacecraft polymers to energetic ions, electrons and ultraviolet light
|
Tahara, Hirokazu |
|
1997 |
121 |
1-4 |
p. 446-449 4 p. |
artikel |
25 |
Fabrication of PbTiO3 thin films by laser metalorganic chemical vapor deposition
|
Tokita, Koji |
|
1997 |
121 |
1-4 |
p. 408-411 4 p. |
artikel |
26 |
Formation of an ohmic electrode in SiC using a pulsed laser irradiation method
|
Eryu, Osamu |
|
1997 |
121 |
1-4 |
p. 419-421 3 p. |
artikel |
27 |
Formation of metallic nanophases in insulators by high-energy ion-beam mixing
|
Thomé, Lionel |
|
1997 |
121 |
1-4 |
p. 237-243 7 p. |
artikel |
28 |
Fullerene ion irradiation to silicon
|
Tanomura, M. |
|
1997 |
121 |
1-4 |
p. 480-483 4 p. |
artikel |
29 |
Future trends for large-area pulsed laser deposition
|
Greer, J.A. |
|
1997 |
121 |
1-4 |
p. 357-362 6 p. |
artikel |
30 |
Germanium nanostructures deposited by the cluster-beam evaporation technique
|
Nozaki, S. |
|
1997 |
121 |
1-4 |
p. 455-458 4 p. |
artikel |
31 |
Gold-carbon composite thin films for electrochemical gas sensor prepared by reactive plasma sputtering
|
Okamoto, A. |
|
1997 |
121 |
1-4 |
p. 179-183 5 p. |
artikel |
32 |
Heteroepitaxial growth of Y2O3 films on Si(100) by reactive ionized cluster beam deposition
|
Choi, S.C. |
|
1997 |
121 |
1-4 |
p. 170-174 5 p. |
artikel |
33 |
High fluence implantation of nitrogen into titanium: Fluence dependence of sputtering yield, retained fluence and nitrogen depth profile
|
Miyagawa, Y. |
|
1997 |
121 |
1-4 |
p. 340-344 5 p. |
artikel |
34 |
High resolution transmission electron microscope study of solid phase epitaxial growth of very high dose, low energy P+ implanted (001) Si
|
Yang, J.J. |
|
1997 |
121 |
1-4 |
p. 195-198 4 p. |
artikel |
35 |
Improved ion beam deposition system with RF sputter-type ion source
|
Miyake, Kiyoshi |
|
1997 |
121 |
1-4 |
p. 102-106 5 p. |
artikel |
36 |
Incident angle dependence of the sputtering effect of Ar-cluster-ion bombardment
|
Kitani, H. |
|
1997 |
121 |
1-4 |
p. 489-492 4 p. |
artikel |
37 |
Inhomogeneous optical SiO x N y thin films prepared by ion assisted deposition
|
Cho, H.J. |
|
1997 |
121 |
1-4 |
p. 137-140 4 p. |
artikel |
38 |
In-situ ion-beam annealing of damage in GaAs during O implantation and O-site determination by 18O(p,α) 15N nuclear reaction
|
Nakata, Jyoji |
|
1997 |
121 |
1-4 |
p. 306-310 5 p. |
artikel |
39 |
Interface structure between polyimide film substrate and copper film prepared by ion beam and vapor deposition (IVD) method
|
Ebe, Akinori |
|
1997 |
121 |
1-4 |
p. 207-211 5 p. |
artikel |
40 |
Introduction to the Applied Laser Engineering Center (ALEC)
|
Fukatsu, Kenichi |
|
1997 |
121 |
1-4 |
p. 7-9 3 p. |
artikel |
41 |
Investigation of ion bombarded polymer surfaces using SIMS, XPS and AFM
|
Lee, Jong Wan |
|
1997 |
121 |
1-4 |
p. 474-479 6 p. |
artikel |
42 |
Ion beam assisted chemical etching of single crystal diamond chips
|
Kiyohara, Shuji |
|
1997 |
121 |
1-4 |
p. 510-513 4 p. |
artikel |
43 |
Ion beam induced epitaxial crystallization of SrTiO3
|
Oyoshi, K. |
|
1997 |
121 |
1-4 |
p. 184-186 3 p. |
artikel |
44 |
Ion beam modification of transparent conducting indium-tin-oxide thin films
|
Haynes, T.E. |
|
1997 |
121 |
1-4 |
p. 221-225 5 p. |
artikel |
45 |
Ion beam smoothing of CVD diamond thin films by etchback method
|
Kiyohara, Shuji |
|
1997 |
121 |
1-4 |
p. 191-194 4 p. |
artikel |
46 |
Irradiation effects of O2 cluster ions for lead oxide film formation
|
Akizuki, M. |
|
1997 |
121 |
1-4 |
p. 166-169 4 p. |
artikel |
47 |
Irradiation effects on the magnetic properties of La1.85Sr0.15CuO4 by high-energy heavy ions
|
Fan, X. |
|
1997 |
121 |
1-4 |
p. 331-334 4 p. |
artikel |
48 |
Laser annealing of an amorphous NdFeB alloy
|
Harada, Tetsuji |
|
1997 |
121 |
1-4 |
p. 383-386 4 p. |
artikel |
49 |
Laser induced formation of micro-rough structures
|
Singh, Rajiv K. |
|
1997 |
121 |
1-4 |
p. 363-366 4 p. |
artikel |
50 |
Laser purification of metals (I); high Rydberg states of Ni, Ag, and Pd
|
Ishikawa, T. |
|
1997 |
121 |
1-4 |
p. 437-441 5 p. |
artikel |
51 |
Laser purification of metals (II); Purification of Ni and Ag
|
Mori, H. |
|
1997 |
121 |
1-4 |
p. 442-445 4 p. |
artikel |
52 |
Metal contacts on shallow junctions
|
Chen, L.J. |
|
1997 |
121 |
1-4 |
p. 231-236 6 p. |
artikel |
53 |
Molecular dynamics simulation for ionized cluster beam deposition
|
Kang, Hee Jae |
|
1997 |
121 |
1-4 |
p. 53-57 5 p. |
artikel |
54 |
Molecular dynamics simulation of damage formation by cluster ion impact
|
Aoki, T. |
|
1997 |
121 |
1-4 |
p. 49-52 4 p. |
artikel |
55 |
Molecular dynamics simulations of low energy atomic collisions between an atom and a substrate: Effect of incident angle and energy
|
Ohashi, Tetsuya |
|
1997 |
121 |
1-4 |
p. 40-43 4 p. |
artikel |
56 |
New large area ultraviolet lamp sources and their applications
|
Boyd, Ian W. |
|
1997 |
121 |
1-4 |
p. 349-356 8 p. |
artikel |
57 |
Nitrogen distribution and microstructure of hot implanted FeTi alloy films
|
Ohtani, S. |
|
1997 |
121 |
1-4 |
p. 319-322 4 p. |
artikel |
58 |
Observation of long range disorder caused by low energy (20–200 eV) O+ and Ar+ beams, in NdBaCuO films
|
Pindoria, G. |
|
1997 |
121 |
1-4 |
p. 141-145 5 p. |
artikel |
59 |
On the possibility of channeled ion assisted epitaxial growth
|
Saitoh, Kazuo |
|
1997 |
121 |
1-4 |
p. 84-89 6 p. |
artikel |
60 |
Optical and structural characterization of implanted nanocrystalline semiconductors
|
Shimizu-Iwayama, Tsutomu |
|
1997 |
121 |
1-4 |
p. 450-454 5 p. |
artikel |
61 |
Organizers and committees
|
|
|
1997 |
121 |
1-4 |
p. viii- 1 p. |
artikel |
62 |
Oxidation of silicon by low energy oxygen ions
|
Williams, J.S. |
|
1997 |
121 |
1-4 |
p. 24-29 6 p. |
artikel |
63 |
Oxygen-impurity interactions in crystalline silicon: The cases of aluminum and erbium
|
Rimini, E. |
|
1997 |
121 |
1-4 |
p. 18-23 6 p. |
artikel |
64 |
Patterning silicon carbide on silicon by ion modification of C60 films
|
Moro, L. |
|
1997 |
121 |
1-4 |
p. 151-153 3 p. |
artikel |
65 |
Photoluminescence characterization of dually Cd+ and N+ ion-implanted GaAs
|
Kotani, M. |
|
1997 |
121 |
1-4 |
p. 302-305 4 p. |
artikel |
66 |
Photoluminescence studies of epitaxial Si1−x Ge x and Si1−x−yGexCy layers on Si formed by ion beam synthesis
|
Katsumata, H. |
|
1997 |
121 |
1-4 |
p. 146-150 5 p. |
artikel |
67 |
Photoresponse of zinc phosphide thin films grown by ionized cluster beam deposition
|
Kakishita, K. |
|
1997 |
121 |
1-4 |
p. 175-178 4 p. |
artikel |
68 |
Plasma doping optimization for ultra-shallow junctions
|
Jones, Erin C. |
|
1997 |
121 |
1-4 |
p. 216-220 5 p. |
artikel |
69 |
Plasma immersion ion implantation for materials modification and semiconductor processing: Carbon nitride films and poly-Si TFTs hydrogenation
|
Husein, Imad F. |
|
1997 |
121 |
1-4 |
p. 226-230 5 p. |
artikel |
70 |
Preface
|
Yamada, Isao |
|
1997 |
121 |
1-4 |
p. vii- 1 p. |
artikel |
71 |
Preparation and catalytic activity of nano-scale Au islands supported on TiO2
|
Takaoka, Gikan H. |
|
1997 |
121 |
1-4 |
p. 503-506 4 p. |
artikel |
72 |
Preparation of amorphous carbon thin films by ion beam assisted ECR-plasma CVD
|
Baba, K. |
|
1997 |
121 |
1-4 |
p. 129-132 4 p. |
artikel |
73 |
Preparation of boron nitride films by multi-source plasma CVD method
|
Nonogaki, R. |
|
1997 |
121 |
1-4 |
p. 121-124 4 p. |
artikel |
74 |
Preparation of glass for radiotherapy of cancer by P+ ion implantation at 100 keV
|
Kawashita, Masakazu |
|
1997 |
121 |
1-4 |
p. 323-327 5 p. |
artikel |
75 |
Properties of a new organo silver compound for MOCVD
|
Itsuki, Atsushi |
|
1997 |
121 |
1-4 |
p. 116-120 5 p. |
artikel |
76 |
Pt thin films prepared by low energy plasma sputtering
|
Suzuki, Y. |
|
1997 |
121 |
1-4 |
p. 107-109 3 p. |
artikel |
77 |
Pulsed laser deposition of CdWO4
|
Tanaka, Katsumi |
|
1997 |
121 |
1-4 |
p. 404-407 4 p. |
artikel |
78 |
Pulsed laser deposition of electronic ceramics
|
Horwitz, J.S. |
|
1997 |
121 |
1-4 |
p. 371-377 7 p. |
artikel |
79 |
Pulsed laser deposition of silicon films for solar cell applications
|
Hanabusa, Mitsugu |
|
1997 |
121 |
1-4 |
p. 367-370 4 p. |
artikel |
80 |
Pulsed laser deposition of tungsten carbide thin films on silicon (100) substrate
|
Suda, Y. |
|
1997 |
121 |
1-4 |
p. 396-399 4 p. |
artikel |
81 |
Reactive magnetron sputtering of silicon to produce silicon oxide
|
Howson, R.P. |
|
1997 |
121 |
1-4 |
p. 90-95 6 p. |
artikel |
82 |
Reactive sputtering by SF6 cluster ion beams
|
Toyoda, N. |
|
1997 |
121 |
1-4 |
p. 484-488 5 p. |
artikel |
83 |
Recent advances of focused ion beam technology
|
Gamo, Kenji |
|
1997 |
121 |
1-4 |
p. 464-469 6 p. |
artikel |
84 |
Reliability of shallow n+-type layers formed in dual As and B implanted silicon by rapid thermal annealing
|
Yokota, Katsuhiro |
|
1997 |
121 |
1-4 |
p. 295-298 4 p. |
artikel |
85 |
Research and development of industrial science and technology promoted by NEDO
|
Mukai, Tamotsu |
|
1997 |
121 |
1-4 |
p. 10-17 8 p. |
artikel |
86 |
Residual stress improvement in metal surface by underwater laser irradiation
|
Sano, Yuji |
|
1997 |
121 |
1-4 |
p. 432-436 5 p. |
artikel |
87 |
Review of Ion Engineering Center and related projects in Ion Engineering Research Institute
|
Inoue, Morio |
|
1997 |
121 |
1-4 |
p. 1-6 6 p. |
artikel |
88 |
Room temperature GaAsSi and InPSi wafer direct bonding by the surface activated bonding method
|
Chung, Taek Ryong |
|
1997 |
121 |
1-4 |
p. 203-206 4 p. |
artikel |
89 |
Selection of kinetic energy of laser-ablated particles and its application for deposition of Au, Pt and Ag thin films
|
Sugihara, Tadashi |
|
1997 |
121 |
1-4 |
p. 392-395 4 p. |
artikel |
90 |
Shallow junction formation by polyatomic cluster ion implantation
|
Takeuchi, D. |
|
1997 |
121 |
1-4 |
p. 345-348 4 p. |
artikel |
91 |
Shallow junction formation in Si-devices: Damage accumulation and the role of photo-acoustic probes and multi-species implantation
|
Current, Michael I. |
|
1997 |
121 |
1-4 |
p. 262-266 5 p. |
artikel |
92 |
Si(001) epitaxy from hyperthermal beams: Crystal growth, doping, and electronic properties
|
Greene, J.E. |
|
1997 |
121 |
1-4 |
p. 58-64 7 p. |
artikel |
93 |
SiO bond formation by oxygen implantation into silicon
|
Kajiyama, Kenji |
|
1997 |
121 |
1-4 |
p. 315-318 4 p. |
artikel |
94 |
Sponsors and session chairmen
|
|
|
1997 |
121 |
1-4 |
p. ix- 1 p. |
artikel |
95 |
Sputtering of elemental metals by Ar cluster ions
|
Matsuo, Jiro |
|
1997 |
121 |
1-4 |
p. 459-463 5 p. |
artikel |
96 |
Sputtering of indium-tin oxide
|
Howson, R.P. |
|
1997 |
121 |
1-4 |
p. 96-101 6 p. |
artikel |
97 |
STM observation of HOPG surfaces irradiated with Ar cluster ions
|
Seki, T. |
|
1997 |
121 |
1-4 |
p. 498-502 5 p. |
artikel |
98 |
Study of Ar cluster ion bombardment of a sapphire surface
|
Takeuchi, D. |
|
1997 |
121 |
1-4 |
p. 493-497 5 p. |
artikel |
99 |
Study on the effect of the interlayer on the adhesion of 400 μm thick film
|
Murakami, Y. |
|
1997 |
121 |
1-4 |
p. 212-215 4 p. |
artikel |
100 |
Surface morphology and resistivity of aluminum oxide films prepared by plasma CVD combined with ion beam irradiation
|
Nakai, H. |
|
1997 |
121 |
1-4 |
p. 125-128 4 p. |
artikel |
101 |
Synthesis and characterization of SiCSi3N4 composites by dual irradiation of CO2 and excimer lasers
|
Yamada, Tetsuo |
|
1997 |
121 |
1-4 |
p. 378-382 5 p. |
artikel |
102 |
Synthesis of sputtered thin films in low energy ion beams
|
Howson, R.P. |
|
1997 |
121 |
1-4 |
p. 65-72 8 p. |
artikel |
103 |
TEM investigation of the stainless steel/aluminum interface created by the surface activated bonding method
|
Yang, Liu |
|
1997 |
121 |
1-4 |
p. 519-523 5 p. |
artikel |
104 |
Temperature-dependent study of ion-channeling in Fe Cr superlattices
|
Rüders, F. |
|
1997 |
121 |
1-4 |
p. 30-35 6 p. |
artikel |
105 |
The behavior of fcc Cu nanocrystallites in Si(100)
|
Kim, Sang-Hyeob |
|
1997 |
121 |
1-4 |
p. 514-518 5 p. |
artikel |
106 |
The charge effects in the low-energy ion depositing processes
|
Kiuchi, Masato |
|
1997 |
121 |
1-4 |
p. 154-156 3 p. |
artikel |
107 |
The 3-D profiling of B ions implanted into Si
|
Nakagawa, S.T. |
|
1997 |
121 |
1-4 |
p. 36-39 4 p. |
artikel |
108 |
The effect of B and P ion implantation on superconducting magnetic shielding in NbTi sheets
|
Ogawa, Souichi |
|
1997 |
121 |
1-4 |
p. 328-330 3 p. |
artikel |
109 |
The synthesis of diamond particles by a filament assisted CO2 laser induced CVD
|
Gaze, Joseph |
|
1997 |
121 |
1-4 |
p. 427-431 5 p. |
artikel |
110 |
Time-of-flight mass spectrometric studies on the plume dynamics of laser ablation of graphite
|
Kokai, F. |
|
1997 |
121 |
1-4 |
p. 387-391 5 p. |
artikel |
111 |
Trapping of hydrogen in silicon-implanted aluminum
|
Ogura, Masahiko |
|
1997 |
121 |
1-4 |
p. 470-473 4 p. |
artikel |
112 |
Tribological hard layer synthesis by duplex ion beam treatment
|
Han, Jeon G. |
|
1997 |
121 |
1-4 |
p. 79-83 5 p. |
artikel |
113 |
Tribological properties of titanium nitride films prepared by dynamic ion beam mixing method
|
Nagasaka, Hiroshi |
|
1997 |
121 |
1-4 |
p. 279-282 4 p. |
artikel |
114 |
Ultramicrohardness measurement of ion implanted alumina
|
Ikeyama, M. |
|
1997 |
121 |
1-4 |
p. 335-339 5 p. |
artikel |
115 |
Utilizing of hydrocarbon contamination for prevention of the surface charge-up at electron-beam assisted chemical etching of a diamond chip
|
Taniguchi, Jun |
|
1997 |
121 |
1-4 |
p. 507-509 3 p. |
artikel |
116 |
Vacuum characteristics of TiN film coated on the interior surface of a vacuum duct
|
Minato, Michio |
|
1997 |
121 |
1-4 |
p. 187-190 4 p. |
artikel |
117 |
Variable-energy positron beam system and its application to depth-selective defect analysis
|
Hirata, K. |
|
1997 |
121 |
1-4 |
p. 267-270 4 p. |
artikel |