| no |
title |
author |
magazine |
year |
volume |
issue |
page(s) |
type |
| 1 |
Acknowledgment of Reviewers 2007
|
|
|
2007
|
84 |
12 |
p. I-
1 p.
|
article
|
| 2 |
A pixel-based regularization approach to inverse lithography
|
Poonawala, Amyn
|
|
2007
|
84 |
12 |
p. 2837-2852
16 p.
|
article
|
| 3 |
A study on the correlation between electrochemical corrosion and chemical mechanical polishing performance of W and Ti film
|
Seo, Yong-Jin
|
|
2007
|
84 |
12 |
p. 2769-2774
6 p.
|
article
|
| 4 |
Chemical mechanical planarization operation via dynamic programming
|
Lin, Chia-Shui
|
|
2007
|
84 |
12 |
p. 2817-2831
15 p.
|
article
|
| 5 |
Controlling resist thickness and etch depth for fabrication of 3D structures in electron-beam grayscale lithography
|
Kim, J.
|
|
2007
|
84 |
12 |
p. 2859-2864
6 p.
|
article
|
| 6 |
Dependence of electrical properties on interfacial layer of Ta2O5 films
|
Lee, Jae-Woong
|
|
2007
|
84 |
12 |
p. 2865-2868
4 p.
|
article
|
| 7 |
Dielectric constant of barium titanate/cyanoethyl ester of polyvinyl alcohol composite in comparison with the existing theoretical models
|
Kota, Ravikiran
|
|
2007
|
84 |
12 |
p. 2853-2858
6 p.
|
article
|
| 8 |
Direct stamp fabrication for NIL and hot embossing using HSQ
|
Gadegaard, N.
|
|
2007
|
84 |
12 |
p. 2785-2789
5 p.
|
article
|
| 9 |
Effect of organic acids on copper chemical mechanical polishing
|
Wu, Yung-Fu
|
|
2007
|
84 |
12 |
p. 2790-2798
9 p.
|
article
|
| 10 |
Erratum to: “Temperature effects of pad conditioning process on oxide CMP: Polishing pad, slurry characteristics, and surface reactions” [Microelect. Eng. 83 (2006) 362–370]
|
Kim, Nam-Hoon
|
|
2007
|
84 |
12 |
p. 2927-
1 p.
|
article
|
| 11 |
Evaluation of electrical and optical properties of indium tin oxide thin film using chemical mechanical polishing technique
|
Seo, Yong-Jin
|
|
2007
|
84 |
12 |
p. 2896-2900
5 p.
|
article
|
| 12 |
Fabrication of microfluidic channels derived from a UV/thermally cured preceramic polymer via a soft lithographic technique
|
Lee, Hong-Joo
|
|
2007
|
84 |
12 |
p. 2892-2895
4 p.
|
article
|
| 13 |
Fabrication of SiO2 microdisk arrays for optics and light trapping experiments
|
Saraf, L.V.
|
|
2007
|
84 |
12 |
p. 2799-2803
5 p.
|
article
|
| 14 |
Improved double-recessed 4H-SiC MESFETs structure with recessed source/drain drift region
|
Zhang, Jinping
|
|
2007
|
84 |
12 |
p. 2888-2891
4 p.
|
article
|
| 15 |
Inside Front Cover - Editorial Board
|
|
|
2007
|
84 |
12 |
p. IFC-
1 p.
|
article
|
| 16 |
Integration of Hf x Ta y N metal gate with SiO2 and HfO x N y gate dielectrics for MOS device applications
|
Yang, Chang-Ta
|
|
2007
|
84 |
12 |
p. 2916-2920
5 p.
|
article
|
| 17 |
Lateral SbTeN based multi-layer phase change memory for multi-state storage
|
Yin, You
|
|
2007
|
84 |
12 |
p. 2901-2906
6 p.
|
article
|
| 18 |
MOS capacitors obtained by wet oxidation of n-type 4H–SiC pre-implanted with nitrogen
|
Poggi, A.
|
|
2007
|
84 |
12 |
p. 2804-2809
6 p.
|
article
|
| 19 |
New materials of spin-on organic hardmask for sub-70nm devices
|
Choi, Sang-Jun
|
|
2007
|
84 |
12 |
p. 2832-2836
5 p.
|
article
|
| 20 |
Simulation and fabrication of high voltage AlGaN/GaN based Schottky diodes with field plate edge termination
|
Remashan, K.
|
|
2007
|
84 |
12 |
p. 2907-2915
9 p.
|
article
|
| 21 |
Source/drain extension region engineering in nanoscale double gate SOI MOSFETs: Novel design methodology for low-voltage analog applications
|
Kranti, Abhinav
|
|
2007
|
84 |
12 |
p. 2775-2784
10 p.
|
article
|
| 22 |
Statistical constraints in nanocrystal memory scaling
|
Gusmeroli, Riccardo
|
|
2007
|
84 |
12 |
p. 2869-2874
6 p.
|
article
|
| 23 |
The electrical characteristics of Sn/methyl-red/p-type Si/Al contacts
|
Aydın, M.E.
|
|
2007
|
84 |
12 |
p. 2875-2882
8 p.
|
article
|
| 24 |
Tuning the dielectric properties of hafnium silicate films
|
Fachmann, Christian
|
|
2007
|
84 |
12 |
p. 2883-2887
5 p.
|
article
|
| 25 |
Vertical poly-Si select pn-diodes for emerging resistive non-volatile memories
|
Golubović, D.S.
|
|
2007
|
84 |
12 |
p. 2921-2926
6 p.
|
article
|
| 26 |
Wavelet monitoring of spatial surface roughness for plasma diagnosis
|
Kim, Byungwhan
|
|
2007
|
84 |
12 |
p. 2810-2816
7 p.
|
article
|
Journal description