nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
Ab initio study of high permittivity phase stabilization in HfSiO
|
Fischer, D. |
|
2007 |
|
9-10 |
p. 2039-2042 4 p. |
artikel |
2 |
Acknowledgements
|
|
|
2007 |
|
9-10 |
p. xv- 1 p. |
artikel |
3 |
A consistent model for the hard breakdown distribution including digital soft breakdown: the noble art of area scaling
|
Roussel, Ph.J. |
|
2007 |
|
9-10 |
p. 1925-1928 4 p. |
artikel |
4 |
Amorphous hafnium silicates: structural, electronic and dielectric properties
|
Broqvist, Peter |
|
2007 |
|
9-10 |
p. 2416-2419 4 p. |
artikel |
5 |
Analysis of the post-breakdown current in HfO2/TaN/TiN gate stack MOSFETs for low applied biases
|
Miranda, E. |
|
2007 |
|
9-10 |
p. 1960-1963 4 p. |
artikel |
6 |
A physics-based deconstruction of the percolation model of oxide breakdown
|
Suñé, J. |
|
2007 |
|
9-10 |
p. 1917-1920 4 p. |
artikel |
7 |
Application of combinatorial methodologies for work function engineering of metal gate/high-κ advanced gate stacks
|
Green, M.L. |
|
2007 |
|
9-10 |
p. 2209-2212 4 p. |
artikel |
8 |
Application of group electronegativity concepts to the effective work functions of metal gate electrodes on high-κ gate oxides
|
Schaeffer, J.K. |
|
2007 |
|
9-10 |
p. 2196-2200 5 p. |
artikel |
9 |
Atomic layer deposition of ZrO2 and HfO2 on deep trenched and planar silicon
|
Kukli, Kaupo |
|
2007 |
|
9-10 |
p. 2010-2013 4 p. |
artikel |
10 |
Atomic - vapour - deposited HfO2 and Sr4Ta2O9 layers for metal-insulator-metal applications
|
Lukosius, M. |
|
2007 |
|
9-10 |
p. 2165-2168 4 p. |
artikel |
11 |
Author Index
|
|
|
2007 |
|
9-10 |
p. 2420-2439 20 p. |
artikel |
12 |
Automatic statistical full quantum analysis of C-V and I-V characteristics for advanced MOS gate stacks
|
Leroux, C. |
|
2007 |
|
9-10 |
p. 2408-2411 4 p. |
artikel |
13 |
Band-edge metal gate materials for atomic-layer-deposited HfO2 for future CMOS technology
|
Hasan, Musarrat |
|
2007 |
|
9-10 |
p. 2205-2208 4 p. |
artikel |
14 |
Band engineering in the high-k dielectrics gate stacks
|
Wang, S.J. |
|
2007 |
|
9-10 |
p. 2332-2335 4 p. |
artikel |
15 |
Borderless silicon nitride defect behaviour and their influences on initial data loss in single polysilicon flash memories
|
Beylier, G. |
|
2007 |
|
9-10 |
p. 1990-1993 4 p. |
artikel |
16 |
Characterization of chemical bonding features and defect state density in HfSiOx Ny/SiO2 gate stack
|
Ohta, A. |
|
2007 |
|
9-10 |
p. 2386-2389 4 p. |
artikel |
17 |
Characterization of electrically active defects in high-k gate dielectrics by using low frequency noise and charge pumping measurements
|
Xiong, H.D. |
|
2007 |
|
9-10 |
p. 2230-2234 5 p. |
artikel |
18 |
Charge carrier generation/trapping mechanisms in HfO2/SiO2 stack
|
Samanta, Piyas |
|
2007 |
|
9-10 |
p. 1964-1967 4 p. |
artikel |
19 |
Charge pumping spectroscopy: HfSiON defect study after substrate hot electron injection
|
Toledano-Luque, M. |
|
2007 |
|
9-10 |
p. 1943-1946 4 p. |
artikel |
20 |
Charge trapping in ultrathin Gd2O3 high-k dielectric
|
Nazarov, A.N. |
|
2007 |
|
9-10 |
p. 1968-1971 4 p. |
artikel |
21 |
CMOS gate oxide defects induced by pre-gate plasma process
|
Carrère, J-P. |
|
2007 |
|
9-10 |
p. 2109-2112 4 p. |
artikel |
22 |
Comparing GaAs and In0.15Ga0.85As as channel material for alternative substrate CMOS
|
Brammertz, G. |
|
2007 |
|
9-10 |
p. 2154-2157 4 p. |
artikel |
23 |
Comparison of stressed Poly-Si and TiN gated Hf-based NMOSFETs characteristics, modeling and their impact on circuits performance
|
Aguilera, L. |
|
2007 |
|
9-10 |
p. 2113-2116 4 p. |
artikel |
24 |
Compound semiconductor MOSFETs
|
Droopad, R. |
|
2007 |
|
9-10 |
p. 2138-2141 4 p. |
artikel |
25 |
Concurrent HCI-NBTI: worst case degradation condition for 65 nm p-channel SOI MOSFETs
|
Mishra, R. |
|
2007 |
|
9-10 |
p. 2085-2088 4 p. |
artikel |
26 |
Contents
|
|
|
2007 |
|
9-10 |
p. iv-xii nvt p. |
artikel |
27 |
Core level photoemission study of nitrided hafnium silicate thin films
|
Barrett, N. |
|
2007 |
|
9-10 |
p. 2302-2305 4 p. |
artikel |
28 |
Current transport mechanisms in (HfO2)x(SiO2) 1−x/SiO2gate stacks
|
Mitrovic, I.Z. |
|
2007 |
|
9-10 |
p. 2306-2309 4 p. |
artikel |
29 |
Defect reduction by suppression of π-bonding coupling in nano- and non-crystalline high-(medium)-κ gate dielectrics
|
Lucovsky, G. |
|
2007 |
|
9-10 |
p. 2350-2353 4 p. |
artikel |
30 |
Development of robust interfaces based on crystalline γ-Al2O3(001) for subsequent deposition of amorphous high-κ oxides
|
Merckling, C. |
|
2007 |
|
9-10 |
p. 2243-2246 4 p. |
artikel |
31 |
Device physics of capacitive MEMS
|
Felnhofer, D. |
|
2007 |
|
9-10 |
p. 2158-2164 7 p. |
artikel |
32 |
Dielectric quality and reliability of FUSI/HfSiON devices with process induced strain
|
Shickova, A. |
|
2007 |
|
9-10 |
p. 1906-1909 4 p. |
artikel |
33 |
Dose rate dependence of the back gate degradation in thin gate oxide PD-SOI MOSFETs by 2-MeV electron irradiation
|
Hayama, K. |
|
2007 |
|
9-10 |
p. 2125-2128 4 p. |
artikel |
34 |
Dual layer SrTiO3/HfO2 gate dielectric for aggressively scaled band-edge nMOS devices
|
Choi, C. |
|
2007 |
|
9-10 |
p. 2217-2221 5 p. |
artikel |
35 |
Effect of degas before metal gate deposition on the threshold voltage
|
Pétry, J. |
|
2007 |
|
9-10 |
p. 2255-2258 4 p. |
artikel |
36 |
Effects of thermal treatments on chemical composition and electrical properties of ultra-thin Lu oxide layers on Si
|
Zenkevich, A. |
|
2007 |
|
9-10 |
p. 2263-2266 4 p. |
artikel |
37 |
Electrical and material property enhancement in HfTaSiON-gated MOS devices by tuning Hf composition
|
Tsai, Ping-Hung |
|
2007 |
|
9-10 |
p. 1902-1905 4 p. |
artikel |
38 |
Electrical and reliability characterization of metal-gate/HfO2/Ge FET’s with Si passivation
|
Kaczer, B. |
|
2007 |
|
9-10 |
p. 2067-2070 4 p. |
artikel |
39 |
Electrical characteristic fluctuations in 16 nm bulk-FinFET devices
|
Li, Yiming |
|
2007 |
|
9-10 |
p. 2093-2096 4 p. |
artikel |
40 |
Electrical characterization of directly deposited La-Sc oxides complex for gate insulator application
|
Kawanago, T. |
|
2007 |
|
9-10 |
p. 2235-2238 4 p. |
artikel |
41 |
Electrical stress on irradiated thin gate oxide partially depleted SOI nMOSFETs
|
Rafí, J.M. |
|
2007 |
|
9-10 |
p. 2081-2084 4 p. |
artikel |
42 |
Electronic structure of insulator-confined ultra-thin Si channels
|
Sushko, P.V. |
|
2007 |
|
9-10 |
p. 2043-2046 4 p. |
artikel |
43 |
Electronic structure of silicon interfaces with amorphous and epitaxial insulating oxides: Sc2O3, Lu2O3, LaLuO3
|
Afanas’ev, V.V. |
|
2007 |
|
9-10 |
p. 2278-2281 4 p. |
artikel |
44 |
Engineering the interface between epitaxial lanthanide oxide thin films and Si substrates: a route towards tuning the electrical properties
|
Laha, Apurba |
|
2007 |
|
9-10 |
p. 2282-2285 4 p. |
artikel |
45 |
Enhancement in thermal stability of atomic layer deposited HfO2 films by using top Hf metal layer
|
Park, Tae Joo |
|
2007 |
|
9-10 |
p. 2226-2229 4 p. |
artikel |
46 |
Epitaxial germanium-on-insulator grown on (001) Si
|
Seo, J.W. |
|
2007 |
|
9-10 |
p. 2328-2331 4 p. |
artikel |
47 |
EPR study of defects in as-received, γ-irradiated and annealed monoclinic HfO2 powder
|
Wright, Sandra |
|
2007 |
|
9-10 |
p. 2378-2381 4 p. |
artikel |
48 |
Evidence of hafnia oxygen vacancy defects in MOCVD grown Hf x Si1−x O y ultrathin gate dielectrics gated with Ru electrode
|
Ťapajna, M. |
|
2007 |
|
9-10 |
p. 2366-2369 4 p. |
artikel |
49 |
Experimental and theoretical study of Ge surface passivation
|
Houssa, M. |
|
2007 |
|
9-10 |
p. 2267-2273 7 p. |
artikel |
50 |
Extraction of gate-edge workfunction of metal gate and its impact on scaled MOSFETs
|
Mise, N. |
|
2007 |
|
9-10 |
p. 2201-2204 4 p. |
artikel |
51 |
Extrinsic stacking fault generation related to high–k dielectric growth on a Si substrate
|
Volkos, S.N. |
|
2007 |
|
9-10 |
p. 2374-2377 4 p. |
artikel |
52 |
Fabrication and characterization of M-I-FIS ferroelectric-gate structures using HfAlOx buffer layer
|
Tokumitsu, E. |
|
2007 |
|
9-10 |
p. 2018-2021 4 p. |
artikel |
53 |
Fin-height controlled TiN-gate FinFET CMOS based on experimental mobility
|
Liu, Y.X. |
|
2007 |
|
9-10 |
p. 2101-2104 4 p. |
artikel |
54 |
First principles investigation of defects at interfaces between silicon and amorphous high-κ oxides
|
Broqvist, Peter |
|
2007 |
|
9-10 |
p. 2022-2027 6 p. |
artikel |
55 |
Forming gas anneal induced flat-band voltage shift of metal-oxide-semiconductor stacks and its link with hydrogen incorporation in metal gates
|
Li, Z. |
|
2007 |
|
9-10 |
p. 2213-2216 4 p. |
artikel |
56 |
Gate dielectric formation and MIS interface characterization on Ge
|
Takagi, S. |
|
2007 |
|
9-10 |
p. 2314-2319 6 p. |
artikel |
57 |
Germanium metal-insulator-semiconductor capacitors with rare earth La2O3 gate dielectric
|
Mavrou, G. |
|
2007 |
|
9-10 |
p. 2324-2327 4 p. |
artikel |
58 |
Hafnium silicate as control oxide in non-volatile memories
|
Erlbacher, T. |
|
2007 |
|
9-10 |
p. 2239-2242 4 p. |
artikel |
59 |
HCI degradation model based on the diffusion equation including the MVHR model
|
Lachenal, D. |
|
2007 |
|
9-10 |
p. 1921-1924 4 p. |
artikel |
60 |
High performance and highly reliable novel CMOS devices using accumulation mode multi-gate and fully depleted SOI MOSFETs
|
Cheng, W. |
|
2007 |
|
9-10 |
p. 2105-2108 4 p. |
artikel |
61 |
High performance, uniaxially-strained, silicon and germanium, double-gate p-MOSFETs
|
Krishnamohan, T. |
|
2007 |
|
9-10 |
p. 2063-2066 4 p. |
artikel |
62 |
Hot-carrier damage from high to low voltage using the energy-driven framework
|
Guerin, C. |
|
2007 |
|
9-10 |
p. 1938-1942 5 p. |
artikel |
63 |
Hydrogen desorption and diffusion in PECVD silicon nitride. Application to passivation of CMOS active pixel sensors
|
Benoit, D. |
|
2007 |
|
9-10 |
p. 2169-2172 4 p. |
artikel |
64 |
Hydrogen effects in MOS devices
|
Tsetseris, L. |
|
2007 |
|
9-10 |
p. 2344-2349 6 p. |
artikel |
65 |
Hydrogen induced positive charge in Hf-based dielectrics
|
Zhao, C.Z. |
|
2007 |
|
9-10 |
p. 2354-2357 4 p. |
artikel |
66 |
III-V field-effect transistors for low power digital logic applications
|
Datta, Suman |
|
2007 |
|
9-10 |
p. 2133-2137 5 p. |
artikel |
67 |
Impact of high-κ and SiO2 interfacial layer thickness on low-frequency (1/f) noise in aggressively scaled metal gate/HfO2 n-MOSFETs: role of high-κ phonons
|
Srinivasan, P. |
|
2007 |
|
9-10 |
p. 2274-2277 4 p. |
artikel |
68 |
Impact of process conditions on interface and high-κ trap density studied by variable T charge-T discharge charge pumping (VT2CP)
|
Zahid, M.B. |
|
2007 |
|
9-10 |
p. 1951-1955 5 p. |
artikel |
69 |
Impact of temperature on non-equilibrium Fowler-Nordheim EEPROM programming
|
Baboux, N. |
|
2007 |
|
9-10 |
p. 2006-2009 4 p. |
artikel |
70 |
Impact of weak Fermi-level pinning on the correct interpretation of III-V MOS C-V and G-V characteristics
|
Martens, K. |
|
2007 |
|
9-10 |
p. 2146-2149 4 p. |
artikel |
71 |
Improved electrical characteristics of high-k gated MOS devices by nitrogen incorporation with plasma immersion ion implantation (PIII)
|
Tsai, Ping-Hung |
|
2007 |
|
9-10 |
p. 2192-2195 4 p. |
artikel |
72 |
Improved reliability of Ge MOS capacitor with HfTiON high-k dielelctric by using Ge surface pretreatment in wet NO
|
Li, C.X. |
|
2007 |
|
9-10 |
p. 2340-2343 4 p. |
artikel |
73 |
Improvement of interfacial properties with interfacial layer in La2O3/Ge structure
|
Song, J. |
|
2007 |
|
9-10 |
p. 2336-2339 4 p. |
artikel |
74 |
Improvement of memory properties for MANOS-type nonvolatile memory devices with high-pressure wet vapor annealing
|
Chang, Man |
|
2007 |
|
9-10 |
p. 2002-2005 4 p. |
artikel |
75 |
Improvements of ozone surface treatment on the electrical characteristics and reliability in HfO2 gate stacks
|
Chen, Shih-Chang |
|
2007 |
|
9-10 |
p. 1898-1901 4 p. |
artikel |
76 |
Independent double-gate FinFETs with asymmetric gate stacks
|
Masahara, M. |
|
2007 |
|
9-10 |
p. 2097-2100 4 p. |
artikel |
77 |
In-depth investigation of the mechanisms impacting C-V/G-V characteristics of Ge/GeON/HfO2/TiN stacks by electrical modeling
|
Batude, P. |
|
2007 |
|
9-10 |
p. 2320-2323 4 p. |
artikel |
78 |
INFOS 2007 Conference Committees
|
|
|
2007 |
|
9-10 |
p. xiv- 1 p. |
artikel |
79 |
Inside Front Cover - Editorial Board
|
|
|
2007 |
|
9-10 |
p. IFC- 1 p. |
artikel |
80 |
In-situ MBE Si as passivating interlayer on GaAs for HfO2 MOSCAP’s: effect of GaAs surface reconstruction
|
Webb, D.J. |
|
2007 |
|
9-10 |
p. 2142-2145 4 p. |
artikel |
81 |
Integration of functional epitaxial oxides into silicon: from high-k application to nanostructures
|
Osten, H.J. |
|
2007 |
|
9-10 |
p. 2222-2225 4 p. |
artikel |
82 |
Integration of gas cluster process for copper interconnects reliability improvement and process impact evaluation on BEOL dielectric materials
|
Gras, R. |
|
2007 |
|
9-10 |
p. 2184-2187 4 p. |
artikel |
83 |
Interrelationship between electrical and physical properties of subcritical Si-Ge layers grown directly on silicon for short channel high-performance pMOSFETs
|
Kelly, D.Q. |
|
2007 |
|
9-10 |
p. 2054-2057 4 p. |
artikel |
84 |
Intrinsic and defect-assisted trapping of electrons and holes in HfO2: an ab initio study
|
Ramo, D. Muñoz |
|
2007 |
|
9-10 |
p. 2362-2365 4 p. |
artikel |
85 |
Investigation of polarization mechanisms on unibond buried oxide layer
|
Tsouti, V. |
|
2007 |
|
9-10 |
p. 2129-2132 4 p. |
artikel |
86 |
La-based ternary rare-earth oxides as alternative high-κ dielectrics
|
Lopes, J.M.J. |
|
2007 |
|
9-10 |
p. 1890-1893 4 p. |
artikel |
87 |
Length scales for coherent π-bonding interactions in complex high-k oxide dielectrics and their interfaces
|
Seo, H. |
|
2007 |
|
9-10 |
p. 2298-2301 4 p. |
artikel |
88 |
Long time transients in hafnium oxide
|
Puzzilli, G. |
|
2007 |
|
9-10 |
p. 2394-2397 4 p. |
artikel |
89 |
Low-leakage MIS structures with 1.5-6 nm CaF2 insulating layer on Si(111)
|
Sokolov, N.S. |
|
2007 |
|
9-10 |
p. 2247-2250 4 p. |
artikel |
90 |
Low temperature influence on the uniaxially strained FD SOI nMOSFETs behavior
|
de Souza, M. |
|
2007 |
|
9-10 |
p. 2121-2124 4 p. |
artikel |
91 |
Materials and device structures for sub-32 nm CMOS nodes
|
Skotnicki, Thomas |
|
2007 |
|
9-10 |
p. 1845-1852 8 p. |
artikel |
92 |
Memory technology in the future
|
Kim, Kinam |
|
2007 |
|
9-10 |
p. 1976-1981 6 p. |
artikel |
93 |
Metal gate electrodes for devices with high-k gate dielectrics: Zr/ZrO2 and Hf/HfO2 intrinsic interfacial transition regions
|
Lucovsky, G. |
|
2007 |
|
9-10 |
p. 2259-2262 4 p. |
artikel |
94 |
Mobility extraction using RFCV for 80nm MOSFET with 1nm EOT HfSiON/TiN
|
San Andrés, E. |
|
2007 |
|
9-10 |
p. 1878-1881 4 p. |
artikel |
95 |
Modeling HfO2/SiO2/Si interface
|
Gavartin, J.L. |
|
2007 |
|
9-10 |
p. 2412-2415 4 p. |
artikel |
96 |
Modeling of remote Coulomb scattering limited mobility in MOSFET with HfO2/SiO2 gate stacks
|
Barraud, S. |
|
2007 |
|
9-10 |
p. 2404-2407 4 p. |
artikel |
97 |
Modified space-charge limited conduction in tantalum pentoxide MIM capacitors
|
Martinez, V. |
|
2007 |
|
9-10 |
p. 2310-2313 4 p. |
artikel |
98 |
Modulation of the effective work function of fully-silicided (FUSI) gate stacks
|
Kittl, J.A. |
|
2007 |
|
9-10 |
p. 1857-1860 4 p. |
artikel |
99 |
Monitoring plasma nitridation of HfSiOx by corona charge measurements
|
Everaert, J-L. |
|
2007 |
|
9-10 |
p. 2251-2254 4 p. |
artikel |
100 |
Monte Carlo simulations of InGaAs nano-MOSFETs
|
Kalna, K. |
|
2007 |
|
9-10 |
p. 2358-2361 4 p. |
artikel |
101 |
Monte Carlo simulations of InGaAs nano-MOSFETs
|
Kalna, K. |
|
2007 |
|
9-10 |
p. 2150-2153 4 p. |
artikel |
102 |
Multi-gate SOI MOSFETs
|
Colinge, J.P. |
|
2007 |
|
9-10 |
p. 2071-2076 6 p. |
artikel |
103 |
Nanoscale imaging and X-ray spectroscopy of electrically active defects in ultra thin dielectrics on silicon
|
Bernardini, S. |
|
2007 |
|
9-10 |
p. 2286-2289 4 p. |
artikel |
104 |
Nickel nanoparticle deposition at room temperature for memory applications
|
Verrelli, E. |
|
2007 |
|
9-10 |
p. 1994-1997 4 p. |
artikel |
105 |
0.6nm-EOT high-k gate stacks with HfSiOx interfacial layer grown by solid-phase reaction between HfO2 and Si substrate
|
Ogawa, A. |
|
2007 |
|
9-10 |
p. 1861-1864 4 p. |
artikel |
106 |
Non-classical hot-electron mechanism and its implications on the reliability and scalability of the high-κ dielectric N-MOS Flash memory cell
|
Zhang, Y. |
|
2007 |
|
9-10 |
p. 1929-1933 5 p. |
artikel |
107 |
On the RTS phenomenon and trap nature in Flash memory tunnel oxide
|
Fantini, P. |
|
2007 |
|
9-10 |
p. 1998-2001 4 p. |
artikel |
108 |
Oxide interface studies using second harmonic generation
|
Tolk, N.H. |
|
2007 |
|
9-10 |
p. 2089-2092 4 p. |
artikel |
109 |
Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation
|
Ioannou-Sougleridis, V. |
|
2007 |
|
9-10 |
p. 1986-1989 4 p. |
artikel |
110 |
Oxygen-related defects in amorphous HfO2 gate dielectrics
|
Kaneta, C. |
|
2007 |
|
9-10 |
p. 2370-2373 4 p. |
artikel |
111 |
Oxygen vacancies in high-k oxides
|
Tse, K. |
|
2007 |
|
9-10 |
p. 2028-2031 4 p. |
artikel |
112 |
Oxygen vacancy induced charge trapping and positive bias temperature instability in HfO2nMOSFET
|
Jo, Minseok |
|
2007 |
|
9-10 |
p. 1934-1937 4 p. |
artikel |
113 |
Performance and reliability of ultra-thin oxide nMOSFETs under variable body bias
|
Crupi, F. |
|
2007 |
|
9-10 |
p. 1947-1950 4 p. |
artikel |
114 |
Performance assessment of (110) p-FET high-κ/MG: is it mobility or series resistance limited?
|
Trojman, L. |
|
2007 |
|
9-10 |
p. 2058-2062 5 p. |
artikel |
115 |
Performance enhancement of Poly-Si/TiN/SiON based pMOSFETs by addition of an aluminum oxide (AlO) capping layer
|
Singanamalla, R. |
|
2007 |
|
9-10 |
p. 1865-1868 4 p. |
artikel |
116 |
Preface
|
Dimoulas, A. |
|
2007 |
|
9-10 |
p. xiii- 1 p. |
artikel |
117 |
Process-variation- and random-dopants-induced threshold voltage fluctuations in nanoscale CMOS and SOI devices
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Protons at the Si-SiO2 interface: a first principle investigation
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Real-time observation of charging dynamics in hafnium silicate films using MOS capacitance transients
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Recent advances and current challenges in the search for high mobility band-edge high-k/metal gate stacks
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Reduction of the anomalous VT behavior in MOSFETs with high-κ/metal gate stacks
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Reliability degradation of HfSiO gate dielectric layers: influence of nitridation
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Reliability issues for nano-scale CMOS dielectrics
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Reliability nano-characterization of thin SiO2 and HfSixOy/SiO2 gate stacks
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Resistive switching in a Pt/TiO2/Pt thin film stack – a candidate for a non-volatile ReRAM
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Schroeder, Herbert |
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Simulation of implant free III-V MOSFETs for high performance low power Nano-CMOS applications
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Slow oxide trap density profile extraction using gate current low-frequency noise in ultrathin oxide MOSFETs
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SrHfO3 as gate dielectric for future CMOS technology
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Stable and robust low-voltage pentacene transistor based on a hybrid dielectric
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Strain and channel engineering for fully depleted SOI MOSFETs towards the 32 nm technology node
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131 |
Studies of solution processed metal oxides on silicon
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Systematic characterization of soft- and hard-breakdown spots using techniques with nanometer resolution
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The effect of annealing temperature on the electrical properties of metal-ferroelectric (PbZr0.53Ti0.47O3)-insulator (ZrO2)-semiconductor (MFIS) thin-film capacitors
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The evolution of multi-level air gap integration towards 32 nm node interconnects
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The impact of mobility enhanced technology on device performance and reliability for sub-90 nm SOI nMOSFETs
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The influence of HfO2 film thickness on the interface state density and low field mobility of n channel HfO2/TiN gate MOSFETs
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p. 1874-1877 4 p. |
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137 |
Theoretical analysis of high-k dielectric gate stacks
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Thermal-stability improvement of LaON thin film formed using nitrogen radicals
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Understanding of the thermal stability of the hafnium oxide/TiN stack via 2 “high k” and 2 metal deposition techniques
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UV-O3 treatment effects on structural changes of low-k thin films
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