nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
1997 Annual meeting and conference
|
Lucca, Don A. |
|
1997 |
21 |
2-3 |
p. 140- 1 p. |
artikel |
2 |
An optical flatness measurement system for medium-sized surface plates
|
Fan, Kuang-Chao |
|
1997 |
21 |
2-3 |
p. 102-112 11 p. |
artikel |
3 |
An ultraprecision stage for alignment of wafers in advanced microlithography
|
Lee, Chang-Woo |
|
1997 |
21 |
2-3 |
p. 113-122 10 p. |
artikel |
4 |
Calendar
|
|
|
1997 |
21 |
2-3 |
p. 141- 1 p. |
artikel |
5 |
Error analysis of a flexure hinge mechanism induced by machining imperfection
|
Ryu, Jae W. |
|
1997 |
21 |
2-3 |
p. 83-89 7 p. |
artikel |
6 |
High-accuracy roundness measurement by a new error separation method
|
Gao, Wei |
|
1997 |
21 |
2-3 |
p. 123-133 11 p. |
artikel |
7 |
Index
|
|
|
1997 |
21 |
2-3 |
p. 142-144 3 p. |
artikel |
8 |
Modeling and error analysis for assessing spindle radial error motions
|
Tu, Jay F. |
|
1997 |
21 |
2-3 |
p. 90-101 12 p. |
artikel |
9 |
Nanogrinding
|
Gatzen, Hans H. |
|
1997 |
21 |
2-3 |
p. 134-139 6 p. |
artikel |
10 |
Three-dimensional shaping by dot-matrix electrical discharge machining
|
Furutani, Katsushi |
|
1997 |
21 |
2-3 |
p. 65-71 7 p. |
artikel |
11 |
Uncertainty estimation for multiposition form error metrology
|
Tyler Estler, W. |
|
1997 |
21 |
2-3 |
p. 72-82 11 p. |
artikel |