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                             12 results found
no title author magazine year volume issue page(s) type
1 Challenges of the emerging microsystems industry Ohlckers, Per

29 9 p. 587-600
article
2 CMOS-compatible smart temperature sensors Bianchi, R.A.

29 9 p. 627-636
article
3 Editorial introduction Henini, M.

29 9 p. 577-578
article
4 Fabrication and characterization of electrostatically driven silicon microbeams Attia, P.

29 9 p. 641-644
article
5 III–V micromachined devices for microsystems Leclercq, J.L.

29 9 p. 613-619
article
6 Micro actuators and their applications Fujita, Hiroyuki

29 9 p. 637-640
article
7 Monolithic integration of the digitized pressure sensor and the micromechanical switch for the application of a pressure transponder Chun, Kukjin

29 9 p. 621-626
article
8 Patents alert
29 9 p. 659-668
article
9 Possible application of micromachine technology for nanometer lithography Wada, Y.

29 9 p. 601-611
article
10 REBECA-3D: the thermal conductive solver for microelectronics Fradin, J.P.

29 9 p. 651-656
article
11 Some issues for microsystem packaging in plastic and 3D Morrissey, A.

29 9 p. 645-650
article
12 Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products Chau, Kevin H.-L.

29 9 p. 579-586
article
                             12 results found
 
 Koninklijke Bibliotheek - National Library of the Netherlands