nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
Abar furnace users choose Torvac for servicing
|
Croker, Mike |
|
1988 |
38 |
8-10 |
p. 961- 1 p. |
artikel |
2 |
A comparison of ion and fast atom beam reduction in TiO2
|
Saied, SO |
|
1988 |
38 |
8-10 |
p. 917-922 6 p. |
artikel |
3 |
A comparison of ion plated and ion assisted coating of aluminium
|
|
|
1988 |
38 |
8-10 |
p. 943- 1 p. |
artikel |
4 |
A control process for stable operation of a high rate dc reactive planar magnetron sputtering system
|
|
|
1988 |
38 |
8-10 |
p. 947- 1 p. |
artikel |
5 |
Activation of reactive sputtering by a plasma beam from an unbalanced magnetron
|
Spencer, AG |
|
1988 |
38 |
8-10 |
p. 857-859 3 p. |
artikel |
6 |
A dry forevacuum pump capable of very high compression ratio
|
|
|
1988 |
38 |
8-10 |
p. 948- 1 p. |
artikel |
7 |
AES studies of surface phenomena on liquid indium solder
|
|
|
1988 |
38 |
8-10 |
p. 946- 1 p. |
artikel |
8 |
Afterglow and decaying plasma CVD systems
|
Bárdoš, L. |
|
1988 |
38 |
8-10 |
p. 637-642 6 p. |
artikel |
9 |
A measurement technique for checking the net refrigeration capacity of cryopumps under operating conditions
|
Häfner, H-U |
|
1988 |
38 |
8-10 |
p. 771-775 5 p. |
artikel |
10 |
A microprocessor-controlled respiratory gas monitor
|
Holme, AE |
|
1988 |
38 |
8-10 |
p. 787-789 3 p. |
artikel |
11 |
A modular vacuum gauge calibration system for routine use
|
|
|
1988 |
38 |
8-10 |
p. 947- 1 p. |
artikel |
12 |
A new approach to freeze preparation from Balzers
|
Bussell, Alan |
|
1988 |
38 |
8-10 |
p. 957- 1 p. |
artikel |
13 |
A new type of vacuum pump for corrosive and condensable gases
|
Cole, Michael |
|
1988 |
38 |
8-10 |
p. 647-649 3 p. |
artikel |
14 |
Apparatus for HREEL and molecular beam spectroscopy of surfaces
|
|
|
1988 |
38 |
8-10 |
p. 950- 1 p. |
artikel |
15 |
Application of Taguchi analysis to PECVD of tungsten onto gallium arsenide
|
|
|
1988 |
38 |
8-10 |
p. 943- 1 p. |
artikel |
16 |
A retarding-potential/time-of-flight mass spectrometer for residual gas analysis
|
|
|
1988 |
38 |
8-10 |
p. 951- 1 p. |
artikel |
17 |
A special refrigerator cooled cryopump for operation into the rf cavities of the Milan Superconducting cyclotron
|
Michelato, P |
|
1988 |
38 |
8-10 |
p. 831-834 4 p. |
artikel |
18 |
A study of the altered layer produced by oxygen bombardment of silicon
|
Clark, EA |
|
1988 |
38 |
8-10 |
p. 937-941 5 p. |
artikel |
19 |
A study of the residual gas atmosphere during operational life of 20″ 110° CCRTs as a function of bake-out temperature during processing
|
Sciuccati, F |
|
1988 |
38 |
8-10 |
p. 847-851 5 p. |
artikel |
20 |
Author index
|
|
|
1988 |
38 |
8-10 |
p. 953-955 3 p. |
artikel |
21 |
A versatile in situ apparatus for X-ray absorption spectroscopy
|
Greaves, G Neville |
|
1988 |
38 |
8-10 |
p. 929-932 4 p. |
artikel |
22 |
Balzers advances in measurement at Vacuum 88
|
Bussell, Alan |
|
1988 |
38 |
8-10 |
p. 963- 1 p. |
artikel |
23 |
Balzers launch new concept in vacuum measuring instruments
|
Willkinson, Colin |
|
1988 |
38 |
8-10 |
p. 957- 1 p. |
artikel |
24 |
British vacuum council annual address—1988
|
Madey, Theodore E. |
|
1988 |
38 |
8-10 |
p. 579-583 5 p. |
artikel |
25 |
Calibration of vacuum gauges
|
|
|
1988 |
38 |
8-10 |
p. 948- 1 p. |
artikel |
26 |
Cascade cooling/heating systems for vacuum chambers
|
Mitchell, Ian |
|
1988 |
38 |
8-10 |
p. 960- 1 p. |
artikel |
27 |
Characteristics of tungsten substrate with Al2O3 coatings under UHV conditions
|
Mousa, MS |
|
1988 |
38 |
8-10 |
p. 835-838 4 p. |
artikel |
28 |
Computational models of dry etching
|
|
|
1988 |
38 |
8-10 |
p. 948- 1 p. |
artikel |
29 |
Computerised gas analysis from Balzers advances IC quality control
|
Henderson, Neil |
|
1988 |
38 |
8-10 |
p. 958- 1 p. |
artikel |
30 |
Computer supported design of vacuum systems: calculation of pumping speed and simulation of pump down
|
|
|
1988 |
38 |
8-10 |
p. 946- 1 p. |
artikel |
31 |
Construction of magnetron sputtering sources for producing films with good thickness uniformity
|
|
|
1988 |
38 |
8-10 |
p. 949- 1 p. |
artikel |
32 |
Dc-etching of poly-silicon with fluorine chemistry
|
Blom, H-O |
|
1988 |
38 |
8-10 |
p. 813-816 4 p. |
artikel |
33 |
Decoupling of processes in coating systems by pumped buffers
|
Weisweiler, H |
|
1988 |
38 |
8-10 |
p. 677-681 5 p. |
artikel |
34 |
Design and operation of planar magnetron sources to deposit magnetic materials at high rates from thick targets and powders
|
|
|
1988 |
38 |
8-10 |
p. 950- 1 p. |
artikel |
35 |
Developments in vacuum pumping systems based on mechanical pumps with an oil free swept volume
|
Zakrzewski, E |
|
1988 |
38 |
8-10 |
p. 757-760 4 p. |
artikel |
36 |
Diffusion leak artifacts as a secondary standard for gas flow
|
Jitschin, W |
|
1988 |
38 |
8-10 |
p. 883-886 4 p. |
artikel |
37 |
Digital control of ZnS and ZnSe vapour sources in a MBE system
|
Gregory, R.P. |
|
1988 |
38 |
8-10 |
p. 737-740 4 p. |
artikel |
38 |
Dry etch development for silicon processing within a teaching institution
|
Carter, MA |
|
1988 |
38 |
8-10 |
p. 873-876 4 p. |
artikel |
39 |
Dry etching process transfer using plasma diagnostic techniques
|
|
|
1988 |
38 |
8-10 |
p. 948- 1 p. |
artikel |
40 |
Enhanced failure mechanism in a titanium based contact to silicon
|
Nygren, S |
|
1988 |
38 |
8-10 |
p. 741-744 4 p. |
artikel |
41 |
Enhanced rate reactive ion etching utilising a multipolar magnetic electrode
|
|
|
1988 |
38 |
8-10 |
p. 950- 1 p. |
artikel |
42 |
Evaluation of damage to MOS devices fabricated on dry etched substrates
|
|
|
1988 |
38 |
8-10 |
p. 950- 1 p. |
artikel |
43 |
EVC—1: European vacuum conference/ vacuum 88
|
Fitch, R.Keith |
|
1988 |
38 |
8-10 |
p. 573- 1 p. |
artikel |
44 |
Film thickness distribution in magnetron sputtering
|
Swann, S |
|
1988 |
38 |
8-10 |
p. 791-794 4 p. |
artikel |
45 |
Fundamental plasma reactions and phenomena related to thin-film technology
|
|
|
1988 |
38 |
8-10 |
p. 945- 1 p. |
artikel |
46 |
Gas analysis by mass spectrometry: calibration techniques and applications
|
|
|
1988 |
38 |
8-10 |
p. 950- 1 p. |
artikel |
47 |
Gas analysis of metallurgical degassing processes: an application of quadrupole mass spectrometry
|
|
|
1988 |
38 |
8-10 |
p. 947- 1 p. |
artikel |
48 |
Gas evolution in DCPEL panels during forming process
|
Nemanič, V |
|
1988 |
38 |
8-10 |
p. 853-855 3 p. |
artikel |
49 |
High rate dc magnetron sputtering—a review
|
|
|
1988 |
38 |
8-10 |
p. 947- 1 p. |
artikel |
50 |
High temperature failure of protective layers on silicon substrates in vacuum
|
Maydell, EA |
|
1988 |
38 |
8-10 |
p. 745-747 3 p. |
artikel |
51 |
In situ pumping with NEG (non-evaporable getters) during vacuum processing
|
Sciuccati, F |
|
1988 |
38 |
8-10 |
p. 765-769 5 p. |
artikel |
52 |
Instabilities in crossed-field discharges at low pressures
|
Redhead, PA |
|
1988 |
38 |
8-10 |
p. 901-906 6 p. |
artikel |
53 |
Integration of Temescal into Edwards high vacuum
|
Edwards High Vacuum, |
|
1988 |
38 |
8-10 |
p. 963- 1 p. |
artikel |
54 |
Investigation of arc parameters in discharge with a hollow cathode
|
|
|
1988 |
38 |
8-10 |
p. 949- 1 p. |
artikel |
55 |
Investigation of etching Al and AlSi x in the discharge of Cl-containing gases
|
|
|
1988 |
38 |
8-10 |
p. 949- 1 p. |
artikel |
56 |
Ion assisted selective deposition of thin films
|
Berg, S. |
|
1988 |
38 |
8-10 |
p. 621-625 5 p. |
artikel |
57 |
Ion beam processing of III-V semiconductors
|
|
|
1988 |
38 |
8-10 |
p. 948- 1 p. |
artikel |
58 |
Ionisation gauge refurbishment
|
Nicholson, K |
|
1988 |
38 |
8-10 |
p. 962- 1 p. |
artikel |
59 |
Ion plated aluminium on carbon fibres
|
|
|
1988 |
38 |
8-10 |
p. 946- 1 p. |
artikel |
60 |
Jobin Yvon S-300 Raman triple spectrograph
|
John Wilkinson, |
|
1988 |
38 |
8-10 |
p. 959- 1 p. |
artikel |
61 |
Low temperature pulsed plasma deposition. Part I—a new technique for thin film deposition with complete gas dissociation
|
Scarsbrook, G. |
|
1988 |
38 |
8-10 |
p. 627-631 5 p. |
artikel |
62 |
Magnetic properties of sputter-deposited amorphous rare earth-transition metal thin films
|
Davies, C.E. |
|
1988 |
38 |
8-10 |
p. 797-800 4 p. |
artikel |
63 |
Mass spectrometer demos at Berkhamsted
|
Henderson, Neil |
|
1988 |
38 |
8-10 |
p. 961- 1 p. |
artikel |
64 |
Mass spectrometric contamination control of process gases
|
Hasler, E |
|
1988 |
38 |
8-10 |
p. 777-781 5 p. |
artikel |
65 |
Microwave etching processes
|
|
|
1988 |
38 |
8-10 |
p. 950- 1 p. |
artikel |
66 |
Mimas vacuum system and modification of SATURNE synchrotron vacuum system
|
|
|
1988 |
38 |
8-10 |
p. 945- 1 p. |
artikel |
67 |
Modern control and data acquisition systems for large vacuum plants
|
Cuttone, G |
|
1988 |
38 |
8-10 |
p. 727-730 4 p. |
artikel |
68 |
Modifications to the JET vacuum vessel as a result of plasma operation
|
Dietz, K.J. |
|
1988 |
38 |
8-10 |
p. 591-595 5 p. |
artikel |
69 |
More and more from less and less and how it happens—some considerations of the preparation of thin films by chemical vapour deposition under reduced pressure
|
|
|
1988 |
38 |
8-10 |
p. 945- 1 p. |
artikel |
70 |
Multi-chamber dry etching of aluminium
|
Hussla, I |
|
1988 |
38 |
8-10 |
p. 877-881 5 p. |
artikel |
71 |
New catalogue of uhv components from RIBER essential information source for uhv workers
|
|
|
1988 |
38 |
8-10 |
p. 962- 1 p. |
artikel |
72 |
New electron cyclotron resonance (ECR) source for plasma processing applications
|
Tarth, John M. |
|
1988 |
38 |
8-10 |
p. 960- 1 p. |
artikel |
73 |
New furnaces from Torvac exceptional versatility
|
Mike Croker, |
|
1988 |
38 |
8-10 |
p. 959- 1 p. |
artikel |
74 |
New thermal pulse vacuum gauge
|
Cole, Michael |
|
1988 |
38 |
8-10 |
p. 897-899 3 p. |
artikel |
75 |
New vacuum process diagnostic system from Chell has eight modes
|
Mitchell, Ron |
|
1988 |
38 |
8-10 |
p. 959- 1 p. |
artikel |
76 |
Observation of anomalous high resistance to implanted areas caused by reactive ion etching (RIE)
|
Norström, H |
|
1988 |
38 |
8-10 |
p. 801-812 12 p. |
artikel |
77 |
Oil-free vacuum pumps of compact design
|
Berges, Hans-Peter |
|
1988 |
38 |
8-10 |
p. 761-763 3 p. |
artikel |
78 |
Oil reservoir evacuation for pumping condensable vapours through oil sealed rotary vane pumps
|
Lachenmann, Rudolf |
|
1988 |
38 |
8-10 |
p. 659-663 5 p. |
artikel |
79 |
Optically transparent PtSi Schottky contacts on silicon—structure and electrical properties
|
Solt, K |
|
1988 |
38 |
8-10 |
p. 703-705 3 p. |
artikel |
80 |
Palletising as a one-man process
|
Atkinson, Craig |
|
1988 |
38 |
8-10 |
p. 962- 1 p. |
artikel |
81 |
Photon desorption processes in tokamaks
|
Sutherland, GS |
|
1988 |
38 |
8-10 |
p. 913-916 4 p. |
artikel |
82 |
Plasma diagnostic studies for reactive ion etching systems
|
Al-Assadi, K.F. |
|
1988 |
38 |
8-10 |
p. 633-636 4 p. |
artikel |
83 |
Plasma-enhanced chemical vapour deposited SiN films: bulk charge, interface trapping and polarization
|
Ling, CH |
|
1988 |
38 |
8-10 |
p. 865-868 4 p. |
artikel |
84 |
Preliminary report into the effects of nitrogen ion bombardment treatment on mustard seeds
|
Smith, CW |
|
1988 |
38 |
8-10 |
p. 735-736 2 p. |
artikel |
85 |
Preparation and characteristics of diamond-like carbon films
|
Franks, J |
|
1988 |
38 |
8-10 |
p. 749-751 3 p. |
artikel |
86 |
Pressure generation in the ultrahigh vacuum region
|
|
|
1988 |
38 |
8-10 |
p. 951- 1 p. |
artikel |
87 |
Primary pressure measurements down to 10−6 Pa
|
Bergoglio, M |
|
1988 |
38 |
8-10 |
p. 887-891 5 p. |
artikel |
88 |
Problems in pumping aggressive, poisonous and explosive gases
|
Duval, P. |
|
1988 |
38 |
8-10 |
p. 651-658 8 p. |
artikel |
89 |
Process gas monitor at life science exhibition
|
Bussell, Alan |
|
1988 |
38 |
8-10 |
p. 962- 1 p. |
artikel |
90 |
Publications received
|
|
|
1988 |
38 |
8-10 |
p. 963- 1 p. |
artikel |
91 |
Pumping speed of sputter ion pumps
|
Audi, M. |
|
1988 |
38 |
8-10 |
p. 669-671 3 p. |
artikel |
92 |
PVD techniques for optical coatings and integrated optical devices
|
|
|
1988 |
38 |
8-10 |
p. 947- 1 p. |
artikel |
93 |
Quadrupole mass spectrometer monitored and controlled thin film deposition processes under ultrahigh vacuum conditions
|
Koprio, J.A. |
|
1988 |
38 |
8-10 |
p. 783-786 4 p. |
artikel |
94 |
Removal of corrosive exhaust gases in RIE system by a chemical trap
|
|
|
1988 |
38 |
8-10 |
p. 945- 1 p. |
artikel |
95 |
Reverse pillar—a self-aligned and self- planarised metallisation scheme for submicron technology
|
Yeh, JL |
|
1988 |
38 |
8-10 |
p. 817-821 5 p. |
artikel |
96 |
Scanning tunnelling microscopy of ion etched silicon
|
Bestwick, Tim D |
|
1988 |
38 |
8-10 |
p. 823-826 4 p. |
artikel |
97 |
Simple approach to thermal vacuum testing of spacecraft equipment
|
Farquhar, J.F. |
|
1988 |
38 |
8-10 |
p. 843-846 4 p. |
artikel |
98 |
Some comments on the stability of spinning-rotor gauges
|
Redgrave, FJ |
|
1988 |
38 |
8-10 |
p. 839-842 4 p. |
artikel |
99 |
Some issues in plasma-assisted etching
|
|
|
1988 |
38 |
8-10 |
p. 947- 1 p. |
artikel |
100 |
Spectral and spatial distributions of electron traps on semiconductor surfaces
|
|
|
1988 |
38 |
8-10 |
p. 951- 1 p. |
artikel |
101 |
Sputtering under ultrahigh vacuum environment
|
Peter, G |
|
1988 |
38 |
8-10 |
p. 795-796 2 p. |
artikel |
102 |
Studies of the reaction mechanisms for the chemical vapour deposition of tungsten from tungsten hexafluoride in a plasma environment
|
Wood, J |
|
1988 |
38 |
8-10 |
p. 683-688 6 p. |
artikel |
103 |
Study of surface damage in ITO/InP solar cells
|
Dhere, Neelkanth G |
|
1988 |
38 |
8-10 |
p. 753-755 3 p. |
artikel |
104 |
Study of the adsorption of H2O+H2 on oxygen contaminated Nb (110) surfaces at 110 K by ESD, AES and ELS
|
Rey, S |
|
1988 |
38 |
8-10 |
p. 907-911 5 p. |
artikel |
105 |
Synchrotron radiation induced neutral gas desorption from samples of vacuum chambers
|
Andritschky, M |
|
1988 |
38 |
8-10 |
p. 933-936 4 p. |
artikel |
106 |
The British vacuum council annual address
|
|
|
1988 |
38 |
8-10 |
p. 575- 1 p. |
artikel |
107 |
The British vacuum council prize and medal
|
|
|
1988 |
38 |
8-10 |
p. 577- 1 p. |
artikel |
108 |
The effect of discharge conditions on the inductively coupled plasma oxidation of silicon
|
Taylor, S. |
|
1988 |
38 |
8-10 |
p. 643-646 4 p. |
artikel |
109 |
The effect of rotor acceleration on the zero stability of spinning rotor gauges
|
Lindenau, BE |
|
1988 |
38 |
8-10 |
p. 893-896 4 p. |
artikel |
110 |
The electron stimulated interaction of water with a silicon surface
|
Bennett, SL |
|
1988 |
38 |
8-10 |
p. 923-927 5 p. |
artikel |
111 |
The ESRF vacuum system
|
Trickett, B.A. |
|
1988 |
38 |
8-10 |
p. 607-612 6 p. |
artikel |
112 |
The performance of a multistage dry pump operating under non-standard conditions
|
Laurenson, L. |
|
1988 |
38 |
8-10 |
p. 665-668 4 p. |
artikel |
113 |
The performance of residual gas analysers when used in high vacuum systems
|
|
|
1988 |
38 |
8-10 |
p. 951- 1 p. |
artikel |
114 |
Thermal conductivity vacuum gauges suitable for use with very long cable lengths
|
|
|
1988 |
38 |
8-10 |
p. 948- 1 p. |
artikel |
115 |
The role of layer growth on interface roughness in Ni-C multilayer X-ray mirrors
|
Puik, EJ |
|
1988 |
38 |
8-10 |
p. 707-709 3 p. |
artikel |
116 |
The series expansion method for vacuum gauge calibration
|
|
|
1988 |
38 |
8-10 |
p. 951- 1 p. |
artikel |
117 |
The sputter deposition of precision metal multilayers
|
Somekh, R.E. |
|
1988 |
38 |
8-10 |
p. 693-697 5 p. |
artikel |
118 |
The UHV system of the CELSIUS storage ring in Uppsala
|
Westerberg, L. |
|
1988 |
38 |
8-10 |
p. 585-589 5 p. |
artikel |
119 |
The use of programmable logic controllers for vacuum plant
|
Nuttall, JD |
|
1988 |
38 |
8-10 |
p. 719-725 7 p. |
artikel |
120 |
The vacuum properties of doped tungsten filaments
|
Dancs, É |
|
1988 |
38 |
8-10 |
p. 827-830 4 p. |
artikel |
121 |
The vacuum system of the Milan superconducting cyclotron cryostat
|
|
|
1988 |
38 |
8-10 |
p. 945- 1 p. |
artikel |
122 |
The warm sections of the HERA proton ring vacuum system
|
Römer, J.G.M. |
|
1988 |
38 |
8-10 |
p. 613-615 3 p. |
artikel |
123 |
Thickness uniformity of vacuum deposited layers
|
Todorova, S |
|
1988 |
38 |
8-10 |
p. 869-872 4 p. |
artikel |
124 |
Thin films of plasma polymerised organic materials and ion beam assisted deposition
|
Al-Hashmi, SAR |
|
1988 |
38 |
8-10 |
p. 861-864 4 p. |
artikel |
125 |
Thin films sputtering and evaporation
|
Mihill, EG |
|
1988 |
38 |
8-10 |
p. 962- 1 p. |
artikel |
126 |
Thin film systems for low TCR resistors
|
Razborsek, A |
|
1988 |
38 |
8-10 |
p. 689-692 4 p. |
artikel |
127 |
Torvac Furnaces appoints new product manager
|
Croker, Mike |
|
1988 |
38 |
8-10 |
p. 961- 1 p. |
artikel |
128 |
Turbomolecular vacuum pumps with a new magnetic bearing concept
|
Kabelitz, H-P |
|
1988 |
38 |
8-10 |
p. 673-676 4 p. |
artikel |
129 |
Undergraduate experiments in vacuum physics: a contribution
|
|
|
1988 |
38 |
8-10 |
p. 949- 1 p. |
artikel |
130 |
Vacuum apparatus for a photovoltaic device fabrication laboratory
|
Beavis, LC |
|
1988 |
38 |
8-10 |
p. 699-702 4 p. |
artikel |
131 |
Vacuum brazing of titanium using eddy current heating
|
Brown, KB |
|
1988 |
38 |
8-10 |
p. 731-733 3 p. |
artikel |
132 |
Vacuum considerations and systems for gas-phase experiments with synchrotron radiation
|
Becker, U |
|
1988 |
38 |
8-10 |
p. 597-605 9 p. |
artikel |
133 |
Vacuum measurements in small sealed systems
|
|
|
1988 |
38 |
8-10 |
p. 946- 1 p. |
artikel |
134 |
Vacuum system for a space simulation facility
|
Nuss, H.E. |
|
1988 |
38 |
8-10 |
p. 617-620 4 p. |
artikel |
135 |
Vacuum systems and processes from the viewpoint of software engineering
|
Hagemans, KL |
|
1988 |
38 |
8-10 |
p. 711-718 8 p. |
artikel |