nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
4062. A cathode spot model and its energy balance for metal vapour arcs. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 323-324 2 p. |
artikel |
2 |
Activities in vacuum science and technology in the USSR and in Eastern Europe
|
Yarwood, J |
|
1979 |
29 |
8-9 |
p. 319-322 4 p. |
artikel |
3 |
4092. A gas-discharge atomic hydrogen source for electron-scattering experiments. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 327- 1 p. |
artikel |
4 |
4108. Alignment of X-ray lithography masks using a new interferometric technique—experimental results. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 329- 1 p. |
artikel |
5 |
4083. A neutral-particle analyser for plasma diagnostics. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 326- 1 p. |
artikel |
6 |
4133. Annealing and rolling behaviours of concentration profiles of Cr and Cu implanted into mild steel. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 332- 1 p. |
artikel |
7 |
4078. An X-ray diffraction study on the lattice imperfections in vapour-deposited fcc (Ag-4.5 at % Ge) alloy films. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 325- 1 p. |
artikel |
8 |
4129. A refined ultra-high vacuum furnace for rare gas analysis. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 331- 1 p. |
artikel |
9 |
4057. A rotating-electrode system for improved reproducibility in spark source mass spectrometry. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 323- 1 p. |
artikel |
10 |
Atom and ion sources
|
Steckelmacher, W |
|
1979 |
29 |
8-9 |
p. 333- 1 p. |
artikel |
11 |
4090. Averaging of electron-beam aberrations. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 326- 1 p. |
artikel |
12 |
4079. Beryllium thin films as optical filters in helium discharge lamps. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 325- 1 p. |
artikel |
13 |
4064. Boltzmann equation analysis of the electron swarm development in nitrogen. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
14 |
4056. CAMAC-controlled system for the measurement of ion mobilities. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 323- 1 p. |
artikel |
15 |
4071. Capabilities and limitations of pumps. Steam jet ejectors and liquid ring pumps. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
16 |
4137. Charge neutralization of insulating surfaces in the SEM by gas ionization. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 332- 1 p. |
artikel |
17 |
4131. Chemical characterization of WC-Co composite materials by AES and ISS. (1) Processing. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 331-332 2 p. |
artikel |
18 |
4114. Chrome mask fabrication with electron-beam lithographic system. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 329- 1 p. |
artikel |
19 |
4132. Comparison of Auger signals measured using differential and integral Auger spectra from C and O adsorbed on W. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 332- 1 p. |
artikel |
20 |
4093. Comprehensive analysis of gratings for ultraviolet space instrumentation. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 327- 1 p. |
artikel |
21 |
4073. Controlled vapour growth of small particles of Pd and Fe on thin Al2O3 substrates. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 324-325 2 p. |
artikel |
22 |
4119. Control of pattern dimensions in electron lithography. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 330- 1 p. |
artikel |
23 |
4085. Deflection distortion in scanning electron-beam systems. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 326- 1 p. |
artikel |
24 |
4125. Design aspects of a scanning electron-beam-microfabrication instrument having 10 × 10 mm field coverage, normal substrate incidence and high throughput. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 331- 1 p. |
artikel |
25 |
4110. Design of a medium-power X-ray lithography system. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 329- 1 p. |
artikel |
26 |
4084. Design of a variable-aperture projection and scanning system for electron beam. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 326- 1 p. |
artikel |
27 |
4091. Design of electron-beam scanning systems using the moving objective lens. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 327- 1 p. |
artikel |
28 |
4122. Digitally positioned mechanical stage. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 330- 1 p. |
artikel |
29 |
4112. Direct, electron lithographic fabrication of silicon devices and circuits. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 329- 1 p. |
artikel |
30 |
4126. Double-aperture method of producing variably shaped writing spots for electron lithography. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 331- 1 p. |
artikel |
31 |
4117. Electron-beam exposure profiles in polymer films for metallic film mask fabrication. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 330- 1 p. |
artikel |
32 |
4111. Electron-beam fabrication of submicron gates for GaAs FET's (USA)
|
|
|
1979 |
29 |
8-9 |
p. 329- 1 p. |
artikel |
33 |
4128. Electron-beam lithographic pattern generation system. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 331- 1 p. |
artikel |
34 |
4089. Electrostatic einzel lenses with reduced spherical aberration for use in field-emission guns. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 326- 1 p. |
artikel |
35 |
4075. Evaporated films of arsenic trisulfide: physical model of effects of light exposure and heat cycling. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 325- 1 p. |
artikel |
36 |
4109. Fabrication of integrated injection logic using e-beam lithography. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 329- 1 p. |
artikel |
37 |
4104. Fabrication of micro- and submicron-bubble memory devices by a mask transfer technique with subsequent gatter-ion etching. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 328- 1 p. |
artikel |
38 |
4087. Focusing and dispersing properties of a stigmatic crossed-field energy analyzer. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 326- 1 p. |
artikel |
39 |
4086. Focusing of electron by laser-beam fields. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 326- 1 p. |
artikel |
40 |
4120. High-contrast registration marks for electron-beam pattern exposure on (100) silicon. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 330- 1 p. |
artikel |
41 |
4135. Highly stable single-crystal LaB6 cathode for conventional electron microprobe instruments. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 332- 1 p. |
artikel |
42 |
4054. High-power discharge in Na-Xe vapor. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 323- 1 p. |
artikel |
43 |
4123. High-precision automatic alignment procedure for vector scan e-beam lithography. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 330-331 2 p. |
artikel |
44 |
4076. High-temperature substrate deposition of CdS thin films. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 325- 1 p. |
artikel |
45 |
4099. Imaging and alignment tests on an electron projection system. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 328- 1 p. |
artikel |
46 |
4097. Imaging conditions for electron-beam micromavhining. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 327- 1 p. |
artikel |
47 |
4136. Improved integrated circuit failure analysis using SEM video processing. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 332- 1 p. |
artikel |
48 |
Improvements in film quality through progress in vacuum generation and deposition technology
|
Pulker, HK |
|
1979 |
29 |
8-9 |
p. 309-312 4 p. |
artikel |
49 |
4134. Inspection for defects of a mask containing one- to submicrometer patterns using a scanning electron microscope and feature extraction method. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 332- 1 p. |
artikel |
50 |
4082. Ionic recombination of atomic and molecular ions in flowing afterglow plasmas. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 325-326 2 p. |
artikel |
51 |
4067. Measurement of the traverse diffusion and Townsend's first ionisation coefficients from the observation of the photon flux produced in a Townsend discharge in molecular hydrogen. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
52 |
Measurement of ultra high vacuum Part I. Total pressure measurements
|
Weston, GF |
|
1979 |
29 |
8-9 |
p. 277-291 15 p. |
artikel |
53 |
4096. Mechanism of cavity formation in unfired ceramic by electron beam machining. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 327- 1 p. |
artikel |
54 |
4124. Method of optimizing registration signals for electron-beam microfabrication. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 331- 1 p. |
artikel |
55 |
4058. Multidipole plasma density. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 323- 1 p. |
artikel |
56 |
4116. Negative electron resists for direct fabrication of devices. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 330- 1 p. |
artikel |
57 |
4060. Negative work-function correction at a positively-charged surface. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 323- 1 p. |
artikel |
58 |
4069. Observation of high-temperature electron injection in dense argon and mercury: application to cathode spots. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
59 |
On the difficulties in interpreting thermal evolution spectra
|
Donnelly, SE |
|
1979 |
29 |
8-9 |
p. 303-307 5 p. |
artikel |
60 |
4101. Optical manipulation of resist profile in conformable printing. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 328- 1 p. |
artikel |
61 |
Physics of thin films
|
Steckelmacher, W |
|
1979 |
29 |
8-9 |
p. 334- 1 p. |
artikel |
62 |
4094. Polarisation shift effect in high-density plasmas. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 327- 1 p. |
artikel |
63 |
4105. Polyimide membrane X-ray lithography masks—fabrication and distortion measurements. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 328- 1 p. |
artikel |
64 |
4098. Projection ion lithography with aperture lenses. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 327- 1 p. |
artikel |
65 |
4121. Qualty assurance procedures for MEBES. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 330- 1 p. |
artikel |
66 |
4074. Radiation effects of electron-beam metal depositions on IGFET's. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 325- 1 p. |
artikel |
67 |
4100. Recent progress on the electron image projector. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 328- 1 p. |
artikel |
68 |
4059. Recombination effects in an expanding laser-produced plasma. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 323- 1 p. |
artikel |
69 |
4080. Resistive toroidal equilibria of Tokamak plasmas. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 325- 1 p. |
artikel |
70 |
4072. Rotary pump back-migration. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
71 |
4118. Self-consistent proximity effect correction technique for resist exposure (SPECTRE). (USA)
|
|
|
1979 |
29 |
8-9 |
p. 330- 1 p. |
artikel |
72 |
4102. Simulation of X-ray resist line edge profiles. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 328- 1 p. |
artikel |
73 |
4115. Sol-gel behaviour and image formation in poly(glycidil methacrylate) and its copolymers with ethyl acrylate. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 330- 1 p. |
artikel |
74 |
Some vacuum physics of steam condensers for turbines
|
Bloomer, RN |
|
1979 |
29 |
8-9 |
p. 293-301 9 p. |
artikel |
75 |
4130. Surface analysis of WC-Co composite materials. (2) Quantitative Auger electron spectrometry. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 331- 1 p. |
artikel |
76 |
4103. Surface relief gratings of 3200 Å period fabrication techniques and influence on thin-film growth. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 328- 1 p. |
artikel |
77 |
4088. Systematic transformations of the asymptotic aberration coefficients of round electrostatic lenses (1). (USA)
|
|
|
1979 |
29 |
8-9 |
p. 326- 1 p. |
artikel |
78 |
4081. The anisotropic properties of rare-gas afterglow plasmas. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 325- 1 p. |
artikel |
79 |
4061. The effect of non-uniformities on the measured transport parameters of electron swarms in hydrogen. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 323- 1 p. |
artikel |
80 |
4066. The motion of a low-pressure arc in a strong magnetic field. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
81 |
The producrion of vacuum: Past, present and future
|
Yarwood, J |
|
1979 |
29 |
8-9 |
p. 313-317 5 p. |
artikel |
82 |
4070. The spatial and temporal development of the early phases of homogeneous discharges in N2. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
83 |
4065. The transition from the first to the second stage of the ring discharge. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
84 |
Thin film processing
|
Steckelmacher, W |
|
1979 |
29 |
8-9 |
p. 335- 1 p. |
artikel |
85 |
4095. Three-body attachment in oxygen. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 327- 1 p. |
artikel |
86 |
4063. Time-resolved studies of the electrical breakdown of a gas at radio frequencies. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
87 |
4077. Tin-doping effects in GaAs films grown by molecular beam epitaxy. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 325- 1 p. |
artikel |
88 |
4055. Transmittance of cultured crystalline quartz in the vacuum ultraviolet before and after electron irradiation. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 323- 1 p. |
artikel |
89 |
4068. Two modes of moving striations in neon glow discharges. (GB)
|
|
|
1979 |
29 |
8-9 |
p. 324- 1 p. |
artikel |
90 |
4113. Two-phase high-density charge coupled devices fabricated by electron-beam lithography. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 329- 1 p. |
artikel |
91 |
4127. Variable spot shaping for electron-beam lithography. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 331- 1 p. |
artikel |
92 |
4107. X-ray exposure system using finely position adjusting apparatus. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 328-329 2 p. |
artikel |
93 |
4106. X-ray lithography by synchrotron radiation of INS-ES. (USA)
|
|
|
1979 |
29 |
8-9 |
p. 328- 1 p. |
artikel |