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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 4 of 4 found articles
| Title: |
Ultra Thin Cu film Fabrication by Supercritical Fluid Deposition for ULSI Metallization |
| Author: |
Momose, Takeshi Sugiyama, Masakazu Shimogaki, Yukihiro |
| Appeared in: |
MRS proceedings |
| Paging: | Volume 992 () nr. 1 pages xx |
| Year: |
2007-07-19 |
| Contents: | |
| Publisher: |
Springer International Publishing, Cham |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 4 found articles
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