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High-speed high-quality epitaxial growth of N and B codoped 6H-SiC by closed sublimation method |
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Titel: |
High-speed high-quality epitaxial growth of N and B codoped 6H-SiC by closed sublimation method |
Auteur: |
Maeda, T. Nakamura, Y. Iwaya, M. Kamiyama, S. Amano, H. Akasaki, I. Furusho, T. Kinoshita, H. Yoshimoto, M. |
Verschenen in: |
MRS proceedings |
Paginering: |
Jaargang 891 () nr. 1 pagina's xx |
Jaar: |
2006-03-09 |
Inhoud: |
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Uitgever: |
Springer International Publishing, Cham |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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