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Journal description
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Details for article 19 of 21 found articles
| Title: |
Reactive sputtering deposition and characterization of Ta-N thin films |
| Author: |
Islam, Md Maidul Georgiev, Daniel G. |
| Appeared in: |
MRS advances |
| Paging: | Volume 7 () nr. 25-26 pages 523-527 |
| Year: |
2022-05-23 |
| Contents: | |
| Publisher: |
Springer International Publishing, Cham |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 21 found articles
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