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Fabrication of Diamond-Like Carbon Microgears in Room-Temperature Curing Nanoimprint Lithography Using Ladder-Type Hydrogen Silsesquioxane |
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Title: |
Fabrication of Diamond-Like Carbon Microgears in Room-Temperature Curing Nanoimprint Lithography Using Ladder-Type Hydrogen Silsesquioxane |
Author: |
Kiyohara, Shuji Shimizu, Yuto Ishikawa, Ippei Harigai, Toru Takikawa, Hirofumi Watanabe, Masahiko Sugiyama, Yoshinari Omata, Yukiko Kurashima, Yuichi |
Appeared in: |
MRS advances |
Paging: |
Volume 1 () nr. 16 pages 1119-1124 |
Year: |
2016-02-15 |
Contents: |
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Publisher: |
Springer International Publishing, Cham |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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