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Journal description
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Details for article 87 of 88 found articles
| Title: |
Two material removal modes in chemical mechanical polishing: mechanical plowing vs. chemical bonding |
| Author: |
Wu, Yuan Jiang, Liang Li, Wenhui Zheng, Jiaxin Chen, Yushan Qian, Linmao |
| Appeared in: |
Friction |
| Paging: | Volume 12 () nr. 5 pages 897-905 |
| Year: |
2023-12-15 |
| Contents: | |
| Publisher: |
Tsinghua University Press, Beijing |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 87 of 88 found articles
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