Zhuang, W. Li, T. Barrowcliff, R. Stecker, G. Hsu, S. T.
Verschenen in:
Integrated ferroelectrics
Paginering:
Jaargang 26 (1999) nr. 1-4 pagina's 277-284
Jaar:
1999-10-01
Inhoud:
A series of organic solvents has been used for the preparation of PZT precursor solutions. The stability and the volatility of these PZT precursors have been tested. The results indicate the promising organic solvents are butyl ether, THF, 2-methoxyethyl ether, H(tmhd) and tetraglyme. PZT precursors include Zr(tmhd)4, Zr(OPri)4(HOPri), Zr(OPri)2(tmhd)2, Pb(tmhd)2, Ti(OPri)4 and Ti(OPri)2(tmhd)2, which can be dissolved in some special combinations of these organic solvents without losing volatility. However, iso-propanol should be introduced into the PZT precursor solutions if Ti(OPri)4 is used as the titanium source. The preparations of PZT thin film via MOCVD have been carried out by using new PZT precursor solutions, and high quality PZT thin films have been obtained.