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| Titel: |
Ultra-thin lead titanate films prepared by tripole magnetron sputtering |
| Auteur: |
Karasawa, Junichi Sugiura, Masayuki Wada, Mitusuo Hafid, Mustapha Fukami, Tatsuo |
| Verschenen in: |
Integrated ferroelectrics |
| Paginering: | Jaargang 12 (1996) nr. 2-4 pagina's 105-114 |
| Jaar: |
1996-10-01 |
| Inhoud: |
Ultra-thin lead titanate (PbTiO3) films of 6 to 80 nm in thickness were deposited on single crystal MgO (100) substrate by employing tripole magnetron sputtering system, which was deviced to make the erosion area on the co-axial targets movable, and hence make a layer-by-layer process realized. Thin films of PbTiO3 with highly-oriented perovskite single phase were obtained at substrate temperature of 550°C. In the films thicker than 20 nm, the X-ray diffraction showed clearly the separated (100) and (001) peaks, while in those thinner than 10 nm, two peaks seemed to be superimposed onto a single peak, suggesting a gradual transition into pseudocubic. Far-infrared spectroscopy indicated a thickness-dependent absorption at wavenumber of 85 cm-1, which may be attributed to the phonon related to the Pb-TiO6 vibration. |
| Uitgever: |
Taylor & Francis |
| Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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