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Details for article 22 of 37 found articles
| Title: |
Laser ablation-deposited PZT thin films for piezoelectric microsensors and microactuators |
| Author: |
Nickles, A. S. Ramesh, R. White, R. M. Haller, E. E. |
| Appeared in: |
Integrated ferroelectrics |
| Paging: | Volume 10 (1995) nr. 1-4 pages 89-98 |
| Year: |
1995-10-01 |
| Contents: |
We report on growth and deposition process optimization of laser ablation-deposited Pb(Zr0.53Ti0.47)O3 thin films for application in piezoelectric microdevices. Films were grown on three different substrates: (100) cut LaAlO3 single crystals, Pt/Ti/SiO2/Si, and Pt/Ti/Si3+xN4/Si. On all three substrates, a deposition temperature of 620°C yielded perovskite films with good ferroelectric hysteresis properties. La0.5Sr0.5CoO3 bottom and top electrodes were used for all films. PZT films on Pt/Ti/SiO2/Si showed a variation of texture with film thickness. Thin membranes of PZT on Si3+xN4 were also fabricated. |
| Publisher: |
Taylor & Francis |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 37 found articles
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