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| Titel: |
Implementation of photomasks for guided wave optical components by a step-and-repeat process |
| Auteur: |
Hoffmann, D. Langmann, U. Oppermann, W. |
| Verschenen in: |
Fiber & integrated optics |
| Paginering: | Jaargang 3 (1981) nr. 4 pagina's 401-411 |
| Jaar: |
1981 |
| Inhoud: |
The fabrication of photomasks for integrated optical (i.o.) components presents the particular difficulty of an extreme aspect ratio. It is shown that this problem can often be solved by a synthesizing procedure using a photorepeater. This method is demonstrated for two different versions of i.o. directional couplers (total length 20 mm, width of waveguides 3 μ, width of coupling gap between waveguides 3 μ). Single characteristic parts of the masks, which are composed on the reticle, are joined together by a step-and-repeat process. Residual imperfections of junctions can be neglected for diffused waveguides. Further advantages of the method (constant width of the waveguide and of the separating gap along the total length) are explained. Finally, the i.o. directional couplers produced are examined, and some of their characteristic parameters are described. |
| Uitgever: |
Taylor & Francis |
| Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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