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  A simple technique to interface pyroelectric materials with silicon substrates for infrared detection
 
 
Title: A simple technique to interface pyroelectric materials with silicon substrates for infrared detection
Author: Bauer, Siegfried
Ploss, Bernd
Appeared in: Ferroelectrics letters section
Paging: Volume 9 (1989) nr. 6 pages 155-160
Year: 1989-01-01
Contents: A simple technique is presented to interface pyroelectric materials with Si-substrates, into which sensor array circuitry is integrated. The pyroelectric material is inter-faced with the substrate via a thin dielectric layer. The feasibility of the technique is demonstrated by the realization of a single element infrared sensor.
Publisher: Taylor & Francis
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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