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Journal description
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Details for article 4 of 13 found articles
| Title: |
Development of ultraprecise positioning X–Y stage composed of pneumatic servo bearing actuators |
| Author: |
Sugimoto, A Danjo, H Kitagawa, T Hirayama, T Matsuoka, T Sasaki, K |
| Appeared in: |
Proceedings of the institution of mechanical engineers, Part J: Journal of engineering tribology |
| Paging: | Volume 225 (2011) nr. 7 pages 655-662 |
| Year: |
2011-07 |
| Contents: | |
| Publisher: |
SAGE Publications, Sage UK: London, England |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 13 found articles
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