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                                       Details for article 8 of 11 found articles
 
 
  Observations and simple fracture mechanics analysis of indentation fracture delamination of TiN films on silicon
 
 
Title: Observations and simple fracture mechanics analysis of indentation fracture delamination of TiN films on silicon
Author: Weppelmann, E.R.
Hu, X.-Z.
Swain, M.V.
Appeared in: Journal of adhesion science and technology
Paging: Volume 8 (1994) nr. 6 pages 611-624
Year: 1994-01-01
Contents:
Publisher: Brill, Leiden/Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 8 of 11 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands