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Particle Removal Efficiency and Damage Analysis on Silicon Wafers after Megasonic Cleaning in Solvents |
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Titel: |
Particle Removal Efficiency and Damage Analysis on Silicon Wafers after Megasonic Cleaning in Solvents |
Auteur: |
Barbagini, Francesca Halder, Sandip Janssens, Tom Kenis, Karine Wostyn, Kurt Bearda, Twan Quoc, Toan-Le Leunissen, Peter Mertens, Paul |
Verschenen in: |
Journal of adhesion science and technology |
Paginering: |
Jaargang 23 (2009) nr. 12 pagina's 1709-1721 |
Jaar: |
2009-09-01 |
Inhoud: |
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Uitgever: |
Brill, Leiden/Boston |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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