Measurement and Modeling of Adhesion Energy Between Two Rough Microelectromechanical System (MEMS) Surfaces
Titel:
Measurement and Modeling of Adhesion Energy Between Two Rough Microelectromechanical System (MEMS) Surfaces
Auteur:
Xue, XiaojieDepartment of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, Illinois 61801, USA Polycarpou, AndreasDepartment of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, Illinois 61801, USA Phinney, LeslieSandia National Laboratories, Engineering Sciences Center, P.O. Box 5800 MS 0346, Albuquerque, New Mexico 87185, USA