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                                       Details for article 21 of 197 found articles
 
 
  Application of silanes for promoting resist patterning layer adhesion in semiconductor manufacturing
 
 
Title: Application of silanes for promoting resist patterning layer adhesion in semiconductor manufacturing
Author: Helbert, John N.
Saha, Naresh
Appeared in: Journal of adhesion science and technology
Paging: Volume 5 (1991) nr. 10 pages 905-925
Year: 1991-01-01
Contents:
Publisher: Brill, Leiden/Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 21 of 197 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands