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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 6 of 24 found articles
| Title: |
Effect of slurry aging on stability and performance of chemical mechanical planarization process |
| Author: |
Basim, G. Bahar |
| Appeared in: |
Advanced powder technology |
| Paging: | Volume 22 (2011) nr. 2 pages 9 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
The Society of Powder Technology Japan |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 24 found articles
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