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Journal description
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Details for article 12 of 16 found articles
| Title: |
Reconstruction of LSI Concave Microstructures by Parameter Sensitivity Search in the Best-Fitting Method |
| Author: |
Nakamae, Koji Sugimoto, Hiroshi Fujioka, Hiromu |
| Appeared in: |
Journal of electron microscopy |
| Paging: | Volume 43 (1994) nr. 6 pages 356-360 |
| Year: |
1994-12 |
| Contents: | |
| Publisher: |
Oxford University Press, Oxford |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 16 found articles
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