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Self-calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry |
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Titel: |
Self-calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry |
Auteur: |
Geckeler, Ralf D. Just, Andreas Krause, Michael Schnabel, Olaf Lacey, Ian English, Damon Yashchuk, Valeriy V. |
Verschenen in: |
Journal of synchrotron radiation |
Paginering: |
Jaargang 31 () nr. 4 pagina's 670-680 |
Jaar: |
2024-07-01 |
Inhoud: |
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Uitgever: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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