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Analysis of partially coherent light propagation through the soft X-ray interference lithography beamline at SSRF |
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Titel: |
Analysis of partially coherent light propagation through the soft X-ray interference lithography beamline at SSRF |
Auteur: |
Meng, Xiangyu Yu, Huaina Wang, Yong Ren, Junchao Xue, Chaofan Yang, Shuimin Guo, Zhi Zhao, Jun Wu, Yanqing Tai, Renzhong |
Verschenen in: |
Journal of synchrotron radiation |
Paginering: |
Jaargang 28 () nr. 3 pagina's 902-909 |
Jaar: |
2021-05-01 |
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Uitgever: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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