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Comprehensive characterization of TSV etching performance with phase-contrast X-ray microtomography |
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Titel: |
Comprehensive characterization of TSV etching performance with phase-contrast X-ray microtomography |
Auteur: |
Li, Ke Deng, Biao Zhang, Haipeng Yu, Fucheng Xue, Yanling Xie, Changqing Ye, Tianchun Xiao, Tiqiao |
Verschenen in: |
Journal of synchrotron radiation |
Paginering: |
Jaargang 27 () nr. 4 pagina's 1023-1032 |
Jaar: |
2020-07-01 |
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Uitgever: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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