Towards chemically neutral carbon cleaning processes: plasma cleaning of Ni, Rh and Al reflective optical coatings and thin Al filters for free-electron lasers and synchrotron beamline applications
Titel:
Towards chemically neutral carbon cleaning processes: plasma cleaning of Ni, Rh and Al reflective optical coatings and thin Al filters for free-electron lasers and synchrotron beamline applications
Auteur:
Moreno Fernández, Harol Zangrando, Marco Sauthier, Guillaume Goñi, Alejandro R. Carlino, Vincent Pellegrin, Eric
Verschenen in:
Journal of synchrotron radiation
Paginering:
Jaargang 25 (2018) nr. 6 pagina's 1642-1649
Jaar:
2018-01-01
Inhoud:
Uitgever:
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England