Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings
Title:
Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings
Author:
Matveevskii, Ksenia Nikolaev, Konstantin V. Fallica, Roberto Beckers, Detlef Gateshki, Milen Kharchenko, Alexander Spanjer, Bart Rogachev, Alexander Yakunin, Sergey Ackermann, Marcelo Makhotkin, Igor A.
Appeared in:
Journal of applied crystallography
Paging:
Volume 57 () nr. 5 pages 1288-1298
Year:
2024-00-01
Contents:
Publisher:
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England