In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride
Titel:
In situ and real-time monitoring of structure formation during non-reactive sputter deposition of lanthanum and reactive sputter deposition of lanthanum nitride
Auteur:
Krause, Bärbel Kuznetsov, Dmitry S. Yakshin, Andrey E. Ibrahimkutty, Shyjumon Baumbach, Tilo Bijkerk, Fred
Verschenen in:
Journal of applied crystallography
Paginering:
Jaargang 51 (2018) nr. 4 pagina's 1013-1020
Jaar:
2018-08-01
Inhoud:
Uitgever:
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England