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Reconstructing detailed line profiles of lamellar gratings from GISAXS patterns with a Maxwell solver |
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Titel: |
Reconstructing detailed line profiles of lamellar gratings from GISAXS patterns with a Maxwell solver |
Auteur: |
Soltwisch, Victor Fernández Herrero, Analía Pflüger, Mika Haase, Anton Probst, Jürgen Laubis, Christian Krumrey, Michael Scholze, Frank |
Verschenen in: |
Journal of applied crystallography |
Paginering: |
Jaargang 50 (2017) nr. 5 pagina's 1524-1532 |
Jaar: |
2017-00-01 |
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Uitgever: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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