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Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating |
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Title: |
Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating |
Author: |
Wernecke, Jan Krumrey, Michael Hoell, Armin Kline, R. Joseph Liu, Hung-Kung Wu, Wen-Li |
Appeared in: |
Journal of applied crystallography |
Paging: |
Volume 47 (2014) nr. 6 pages 1912-1920 |
Year: |
2014-02-01 |
Contents: |
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Publisher: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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