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  Accurate determination of surface orientation of single-crystal wafers using high-resolution X-ray rocking curve measurements
 
 
Title: Accurate determination of surface orientation of single-crystal wafers using high-resolution X-ray rocking curve measurements
Author: Kim, Chang Soo
Bin, Seok Min
Jeon, Hyeon-Gu
O, Byungsung
Choi, Young Dae
Appeared in: Journal of applied crystallography
Paging: Volume 46 (2013) nr. 5 pages 1298-1305
Year: 2013-00-01
Contents:
Publisher: International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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