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Characterization of SiGe thin films using a laboratory X-ray instrument |
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Title: |
Characterization of SiGe thin films using a laboratory X-ray instrument |
Author: |
Ulyanenkova, Tatjana Myronov, Maksym Benediktovitch, Andrei Mikhalychev, Alexander Halpin, John Ulyanenkov, Alex |
Appeared in: |
Journal of applied crystallography |
Paging: |
Volume 46 (2013) nr. 4 pages 898-902 |
Year: |
2013-08-01 |
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Publisher: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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