Study of threading dislocation density reduction in AlGaN epilayers by Monte Carlo simulation of high-resolution reciprocal-space maps of a two-layer system
Titel:
Study of threading dislocation density reduction in AlGaN epilayers by Monte Carlo simulation of high-resolution reciprocal-space maps of a two-layer system
Auteur:
Lazarev, S. Barchuk, M. Bauer, S. Forghani, K. HolĂ˝, V. Scholz, F. Baumbach, T.
Verschenen in:
Journal of applied crystallography
Paginering:
Jaargang 46 (2013) nr. 1 pagina's 120-127
Jaar:
2013-02-01
Inhoud:
Uitgever:
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England