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Journal description
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Details for article 43 of 127 found articles
| Title: |
GISAXS study of cavities and {113} defects induced by neon and helium implantation in silicon |
| Author: |
Babonneau, David Peripolli, Suzana Beaufort, Marie-France Barbot, Jean-François Simon, Jean-Paul |
| Appeared in: |
Journal of applied crystallography |
| Paging: | Volume 40 (2007) nr. s1 pages s350-s354 |
| Year: |
2007-04-01 |
| Contents: | |
| Publisher: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 43 of 127 found articles
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